Microelectronics to Nanoelectronics

Microelectronics to Nanoelectronics: Materials, Devices & Manufacturability

Free Standard Shipping

Purchasing Options

ISBN 9781466509542
Cat# K14730
Add to cart
ISBN 9781466509559
Cat# KE16333


  • Describes the state of the art in Si transistor technology in the context of Moore’s law
  • Explores how continued scaling impacts transistor performance
  • Assesses the effect of harsh environments, including radiation, that contribute to semiconductor transistor failure
  • Covers the design, modeling, and analysis of nano-electro-mechanical-systems (NEMS)-based integrated circuits (ICs)
  • Addresses the design, fabrication, and characterization of NEM resonators used as sensitive mass detectors for biological sensing applications
  • Provides examples of the latest developments in nanofabrication derived from both the top-down and the bottom-up approach
  • Details approaches used to integrate single-walled carbon nanotubes (SWCNTs) with complimentary metal-oxide-semiconductor (CMOS) circuitry
  • Discusses CNTs and the methods used to integrate them within the well-established semiconductor processing platform
  • Talks about the broader applications of nanoengineered materials in the areas of electronics, biology, and energy harnessing


Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices and Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena.

Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of California Institute of Technology’s Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul’s considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry.

Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy’s Sandia National Laboratory. Offering something for everyone, from students to scientists to entrepreneurs, this book showcases the broad spectrum of cutting-edge technologies that show significant promise for electronics and related applications in which nanotechnology plays a key role.

Table of Contents

Moore’s Law: Technology Scaling and Reliability Challenges, T. Nigam, K.-Y. Yiang, and A. Marathe

Scaling and Radiation Effects in Silicon Transistors, A.H. Johnston and L.Z. Scheick

Hewlett-Packard’s MEMS Technology: Thermal Inkjet Printing and Beyond, J. Stasiak, S. Richards, and P. Benning

Silicon MEMS Resonators for Timing Applications, B. Kim, M.A. Hopcroft, and R.N. Candler

Nanoscale Electromechanical Devices Enabled by Nanowire Structures, P. X.-L. Feng

Silicon Etching and Etch Techniques for NEMs and MEMs, M.D. Henry and A. Scherer

Learning from Biology: Viral-Templated Materials and Devices, E.D. Haberer

Principles and Methods for Integration of Carbon Nanotubes in Miniaturized Systems, A.J. Hart, S.J.Park, M. F.L. de Volder, S.H. Tawfick, and E.R. Meshot

Heterogeneous Integration of Carbon Nanotubes on Complementary Metal Oxide Semiconductor Circuitry and Sensing Applications, C.-L. Chen, S. Sonkusale, M. Chen, and M.R. Dokmeci

NEMS-Based Ultra Energy-Efficient Digital ICs: Materials, Device Architectures, Logic Implementation, and Manufacturability, H.F. Dadgour and K. Banerjee

Carbon Nanotube Y-Junctions, P.R. Bandaru

Nanoscale Effects in Multiphase Flows and Heat Transfer, N. Singh, D. Shin, and D. Banerjee

Nanoengineered Material Applications in Electronics, Biology, and Energy Harnessing, D.S. Choi, Z. Zhang, and N. Pachauri

Editor Bio(s)

Dr. Anupama B. Kaul obtained her MS and Ph.D degrees in Materials Science and Engineering from the University of California–Berkeley with minors in Electrical Engineering and Physics. She received her BS degrees with honors in Physics, as well as Engineering Physics. Presently, she is a Program Director at the National Science Foundation in the Engineering Directorate, where she is serving as an IPA from the Jet Propulsion Laboratory (JPL) California Institute of Technology (Caltech). Prior to joining JPL – Caltech, Dr. Kaul held industrial research positions at Motorola Labs and the R&D Division of Hewlett-Packard Company, where she worked on RF micro-electro-mechanical-systems (MEMS) components for wireless applications, and surface micro-machined ink-jet print heads, respectively. Dr. Kaul has given numerous invited and keynote talks on nanotechnology-related topics at international conferences and meetings, and she is active in chairing conferences for the IEEE, MRS, SPIE and NSTI, and other professional societies. Dr. Kaul is a Senior Member of the IEEE and has also been selected to participate in the U.S. Frontiers of Engineering Symposium organized by the National Academy of Engineering.

Editorial Reviews

"It is a pleasure to write the foreword for this book because of its timeliness, because of its excellent breadth and depth of coverage, which captures most key facets of the field, and because its editor, Dr. Anupama Kaul, is an esteemed collaborator of mine in MEMS and nanotechnologies research. Indeed, her expertise and excellent reputation in the field derives from her extensive work on the development of carbon nanotubes (CNTs)- and carbon nanofibers (CNFs)-based devices conducted at the Jet Propulsion Laboratory, California Institute of Technology. … she is uniquely qualified to edit such an ambitious piece of work, gathering contributions from a stellar roster of top researchers in the field. … the book marks a milestone by capturing the current status of research and development. Therefore, it is of extreme value to both established researchers as well as newcomers who aim at discovering and exploiting the vast space available at the bottom!"
—From the Foreword by Dr. Héctor J. De Los Santos, Karlsruhe Institute of Technology, Germany

"Excellent topics covering fundamental limits in scaling down silicon based semiconductors to recent promises in nanowire based devices.  ... Overall, this book would be an excellent choice for readers ranging from engineering students to the experts in the field."
—Anirudha V. Sumant, Argonne National Laboratory, Illinois, USA

"… Dr. Kaul has done an excellent job covering the field objectively. The collection touches on very fundamental work in this field but also represents examples of how the evolution from microelectronics to nanoelectronics have resulted in successful products and innovations. As I state above, the contents (and authors) provide an excellent cross section of this field."
—James Stasiak, Hewlett-Packard Company

"Overall, this is an excellent reference book for researchers and educators in the areas of microelectronics and nanoelectronics. … More importantly, this book emphasizes on manufacturability, which is a distinction from other books on similar topics which mostly discuss theoretical principles."
Xing Cheng, Texas A&M University, USA

"… provides comprehensive knowledge on nanoelectronics and the relatred materials processing and manufacturing technology. It also gives a nice introduction to nanoscale device fabrication. In addition, the latest advances and research results are included. The book has a nice balance between introducing fundamentals of nanoscale device fabrication and the in-depth knowledge in the field of nanomanufacturing. a nice reference for both researchers in the field and students who want to learn more …"
—Chuan-Chiang Chen, California State Polytechnic University Pomona, USA

Other CRC Press Sites
Featured Authors
Facebook Page for CRC Press Twitter Page for CRC Press You Tube Channel for CRC Press LinkedIn Page for CRC Press Google Plus Page for CRC Press
Sign Up for Email Alerts
© 2014 Taylor & Francis Group, LLC. All Rights Reserved. Privacy Policy | Cookie Use | Shipping Policy | Contact Us