Handbook of Charged Particle Optics, Second Edition
Features
- Provides up-to-date information on high brightness ion and electron sources
- Covers SEM, STEM and FIB operation
- Offers a detailed analysis of aberration theory and aberration correction
- Includes information on space charge analysis of probe forming instruments
Summary
With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments.
The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work.
Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.
Table of Contents
Review of ZrO/W Schottky Cathode
L. W. Swanson and G. A. Schwind
Liquid Metal Ion Sources
R. G. Forbes and (the late) G. L. R. Mair
Gas Field Ionization Sources
R. G. Forbes
Magnetic Lenses for Electron Microscopy
K. Tsuno
Electrostatic Lenses
B. Lencová
Aberrations
P. W. Hawkes
Space Charge and Statistical Coulomb Effects
P. Kruit and G. H. Jansen
Resolution
M. Sato
Scanning Electron Microscope
A. E. Vladár and M. T. Postek
Scanning Transmission Electron Microscope
A. V. Crewe (updated by P. D. Nellist)
Focused Ion Beams
M. Utlaut
Aberration Correction in Electron Microscopy
O. L. Krivanek, N. Dellby and M. F. Murffitt
Appendix: Computational Resources for Electron Microscopy
J. Orloff (with valuable information from P. W. Hawkes and B. Lencová)
Index
Editorial Reviews
… In giving [a] combination of practical and theoretical aspects, the book is a valuable reference when it comes to the design of charged particle optical elements in microscopy such as scanning electron microscopes or scanning transmission electron microscopes. … The index is very comprehensive and helps in making the book a valuable reference. Although the text comes from 18 different authors each with their individual style, it is nevertheless well written and clear throughout. The eight unnumbered colour pages at the centre of the book are also a nice feature. Altogether, the book is valuable for experts and those who want to become experts concerned with the design and understanding of charged particle optics as used in electron microscopy. Owing to the rigorous mathematical treatment of particle optical effects, it will also help in the analysis of observed effects such as aberrations and their correction, space charge effects, as well as issues concerning the resolution obtained in microscopy.
—Manuel Vogel, Contemporary Physics, Vol. 51, Issue 4, July 2010
