Handbook of Optical Metrology

Handbook of Optical Metrology: Principles and Applications

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ISBN 9780849337604
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Features

  • Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements
  • Discusses interferometry, holography, and speckle methods and applications
  • Explains moire metrology and the optical heterodyne measurement method
  • Delves into the specifics of diffraction, scattering, polarization, and near-field optics
  • Considers applications for measuring length and size, displacement. straightness and parallelism, flatness, and three-dimensional shapes
  • Explores advanced methods such as fringe analysis, photogrammetry, polarimetry, birefringence measurement, and ellipsometry
  • Discusses advances in optical thin film and coatings, and film surface and thickness profilometry

Summary

The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals.

Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications.

With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.

Table of Contents

Fundamentals of Optical Elements and Devices
Light Sources
Natalia Dushkina
Lenses, Prisms, and Mirrors
Peter R. Hall
Optoelectronic Sensors
Motohiro Suyama
Optical Devices and Optomechanical Elements
Akihiko Chaki and Kenji Magara
Fundamentals of Principles and Techniques for Metrology
Propagation of Light
Natalia Dushkina
Interferometry
David A. Page
Holography
Giancarlo Pedrini
Speckle Methods and Applications
Nandigana Krishna Mohan
Moire Metrology
Lianhua Jin
Optical Heterodyne Measurement Method
Masao Hirano
Diffraction
Toru Yoshizawa
Light Scattering
Lev T. Perelman
Polarization
Michael Shribak
Near-Field Optics
Wenhao Huang, Xi Li, and Guoyong Zhang
Length and Size
René Schödel
Practical Applications
Displacement
Akiko Hirai, Mariko Kajima, and Souichi Telada
Straightness and Alignment
Ruedi Thalmann
Flatness
Toshiyuki Takatsuji and Youichi Bitou
Surface Profi lometry
Toru Yoshizawa and Toshitaka Wakayama
Three-Dimensional Shape Measurement
Frank Chen, Gordon M. Brown, and Mumin Song
Fringe Analysis
Jun-ichi Kato
Photogrammetry
Nobuo Kochi
Optical Methods in Solid Mechanics
Anand Asundi
Optical Methods in Flow Measurement
Sang Joon Lee
Polarimetry
Baoliang Wang
Birefringence Measurement
Yukitoshi Otani
Ellipsometry
Hiroyuki Fujiwara
Optical Thin Film and Coatings
Cheng-Chung Lee and Shigetaro Ogura
Film Surface and Thickness Profi lometry
Katsuichi Kitagawa
On-Machine Measurements
Takashi Nomura and Kazuhide Kamiya