Nano- and Micro-Electromechanical Systems

Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition

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Features

  • Establishes the theoretical foundation needed for the synthesis, modeling, simulation, analysis, and design of nano- and microsystems
  • Covers the concepts, techniques, and technologies needed to solve problems related to NEMS and MEMS, devices, and their structures
  • Provides a multidisciplinary approach that encompasses a range of science and engineering disciplines
  • Includes new revisions of every chapter
  • Provides homework problems, case studies, and a solutions manual with qualifying course adoptions
  • Summary

    Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.

    Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.

    Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.

    Table of Contents

    NANOTECHNOLOGY AND MICROTECHNOLOGY (NANO- AND MICRO- SCIENCE, ENGINEERING AND TECHNOLOGY), AND BEYOND
    Introduction and Overview: From Micro- to Nano- and Beyond to Stringo-Scale
    Introductory Definitions to the Subjects
    Current Developments and Needs for Coherent Revolutionary Developments
    Societal Challenges and Implications
    NANO- AND MICROSCALE SYSTEMS, DEVICES, AND STRUCTURES
    Sizing Features: From Micro- to Nano-, and from Nano- to Stringo-Scale MEMS and NEMS Definitions
    Introduction to Taxonomy of Nano- and Microsystem Synthesis and Design
    Introduction to Design and Optimization of Nano- and Microsystems in the Behavioral Domain
    NANO- AND MICROSYSTEMS: CLASSIFICATION AND CONSIDERATION
    Biomimetics, Biological Analogies,and Design of NEMS and MEMS
    Micro- and Nanoelectromechanical Systems: Scaling Laws and Mathematical Modeling
    MEMS Examples and MEMS Architectures
    Introduction to Microfabrication and Micromachining
    FUNDAMENTALS OF MICROFABRICATION AND MEMS FABRICATION TECHNOLOGIES
    Introduction and Description of Basic Processes in Microfabrication
    Microfabrication and Micromachining of ICs, Microstructures, and Microdevices
    MEMS Fabrication Technologies
    DEVISING AND SYNTHESIS OF NEMS AND MEMS
    Motion Nano- and Microdevices: Synthesis and Classification
    Microaccelerometers as Microelectromechanical Microdevices
    Optimization with Application to Synthesis and Classification Solver
    Nanoengineering Bioinformatics and Its Application
    MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS AND DEVICES
    Introduction to Modeling, Analysis, and Simulation
    Basic Electromagnetics with Applications to MEMS and NEMS
    Model Developments of Micro- and Nanoactuators Using Electromagnetics
    Classical Mechanics and Its Application to MEMS
    Equations of Motions
    Direct-Current Micromachines
    Simulation of MEMS in the MATLAB Environment with Examples
    Induction Micromachines
    Synchronous Micromachines
    Permanent-Magnet Stepper Micromotors
    Piezotransducers
    Modeling of Electromagnetic Radiating Energy Microdevices
    Thermodynamics, Thermoanalysis, and Heat Equation
    QUANTUM MECHANICS AND ITS APPLICATIONS
    Atomic Structures and Quantum Mechanics
    Molecular and Nanostructure Dynamics
    Quantum Mechanics and Energy Bands
    MOLECULAR AND CARBON NANOELECTRONICS
    Past, Current, and Future of Electronics with Prospects for 2020 and Beyond
    Fundamentals
    Carbon Nanotubes
    Carbon-Based Nanoelectronics and Three-Dimensional Nano-ICs
    CONTROL OF MEMS AND NEMS
    Continuous-Time and Discrete-Time MEMS
    Analog Control of MEMS Using Transfer Functions
    The Hamilton-Jacobi Theory and Optimal Control of MEMS and NEMS
    Sliding Mode Control of MEMS and NEMS
    Constrained Control of Nonlinear MEMS and NEMS
    Optimization of Microsystems Using Nonquadratic Performance Functionals
    Hamilton-Jacobi Theory and Quantum Mechanics
    Lyapunov Stability Theory in Analysis and Control of MEMS and NEMS
    Digital Control of MEMS and NEMS
    EXAMPLES IN SYNTHESIS, ANALYSIS, DESIGN AND FABRICATION OF MEMS
    Introduction
    Analysis of Energy Conversion and MEMS Performance from Materials and Fabrication Viewpoints
    Analysis of Translational Microtransducers
    Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control
    Microfabrication Topics
    Magnetization Dynamics of Thin Films
    Microstructures and Microtransducers with Permanent-Magnet: Micromirror Actuators
    Reluctance Electromagnetic Micromotors
    Micromachined Polycrystalline Silicon Carbide Micromotors
    Axial Electromagnetic Micromotors
    Cognitive Computer-Aided Design of MEMS

    Editorial Reviews

    “The theoretical equations for each of the NEMS/MEMS characteristics and applications are painstakingly derived and nicely illustrated with generalized charts and schematic drawings… This second edition offers a broader coverage of topics and depth than the author’s first edition…”
    —Micro Nano Newsletter, Dec. 2005, Vol. 10 No. 12

    "This would be an excellent book for a senior undergraduate or graduate two-semester course in materials science or electrical engineering. It not only presents a good overview of important areas of development in micro and nano technology, but it also contains many examples, homework problems, and lots of references for further study at the end of each chapter."

    – In IEEE Electrical Insulation Magazine, May/June 2008, Vol. 24, No. 3

    Downloads Updates

    Resource OS Platform Updated Description Instructions
    files.zip All Windows Version September 14, 2004

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