1st Edition

Fabrication of SiGe HBT BiCMOS Technology

By John D. Cressler Copyright 2008
    258 Pages 155 B/W Illustrations
    by CRC Press

    SiGe HBT BiCMOS technology is the obvious groundbreaker of the Si heterostructures application space. To date virtually every major player in the communications electronics market either has SiGe up and running in-house or is using someone else’s SiGe fab as foundry for their designers. Key to this success lies in successful integration of the SiGe HBT and Si CMOS, with no loss of performance from either device. Filled with contributions from leading experts, Fabrication of SiGe HBT BiCMOS Technologies brings together a complete discussion of these topics into a single resource.

    Drawn from the comprehensive and well-reviewed Silicon Heterostructure Handbook, this volume examines the design, fabrication, and application of silicon heterostructure transistors. A novel aspect of this book the inclusion of numerous snapshot views of the industrial state-of-the-art for SiGe HBT BiCMOS technology. It has been carefully designed to provide a useful basis of comparison for the current status and future course of the global industry. In addition to the copious technical material and the numerous references contained in each chapter, the book includes easy-to-reference appendices on the properties of Si and Ge, the generalized Moll-Ross relations, integral charge-control relations, and sample SiGe HBT compact model parameters.

    Contents
    Foreword; B.S. Meyerson
    Introduction
    The Big Picture; J.D. Cressler
    A Brief History of the Field; J.D. Cressler
    Fabrication of SiGe HBT BiCMOS Technology
    Overview: Fabrication of SiGe HBT BiCMOS Technology; J.D. Cressler
    Device Structures and BiCMOS Integration; D.L. Harame
    SiGe HBTs on CMOS-Compatible SOI; J. Cai and T.H. Ning
    Passive Components; J.N. Burghartz
    Industry Examples at State-of-the-Art: IBM; A.J. Joseph and J.S. Dunn
    Industry Examples at State-of-the-Art: Jazz; P.H.G. Kempf
    Industry Examples at State-of-the-Art: Hitachi; K. Washio
    Industry Examples at State-of-the-Art: Infineon; T.F. Meister, H. Schäfer, W. Perndl, and J. Böck
    Industry Examples at State-of-the-Art: IHP; D. Knoll
    Industry Examples at State-of-the-Art: ST; A. Chantre, M. Laurens, B. Szelag, H. Baudry, P. Chevalier, J. Mourier, G. Troillard, B. Martinet, M. Marty, and A. Monroy
    Industry Examples at State-of-the-Art: Texas Instruments; B. El-Kareh, S. Balster, P. Steinmann, and H. Yasuda
    Industry Examples at State-of-the-Art: Philips; R. Colclaser and P. Deixler

    Biography

    John D. Cressler