1st Edition

High k Gate Dielectrics

Edited By Michel Houssa Copyright 2003
    614 Pages
    by CRC Press

    614 Pages
    by CRC Press

    The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community.

    High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications.

    Introduction
    The need for high-k gate dielectrics and materials requirement
    Deposition techniques
    ALCVD, MOCVD, PLD, MBE
    Characterization
    Physico-chemical characterization
    X-ray and electron spectroscopies
    Oxygen diffusion and thermal stability
    Defect characterization by ESR
    Band alignment determined by photo-injection
    Electrical characteristics
    Theory of defects in high-k materials
    Bonding constraints and defect formation at Si/high-k interfaces
    Band alignment calculations
    Electron mobility at the Si/high-k interface
    Model for defect generation during electrical stress
    Technological aspects
    Device integration issues
    Device concepts for sub-100 nm CMOS technologies
    Transistor characteristics
    Nonvolatile memories based on high-k ferroelectric layers

    Biography

    Michel Houssa Laboratoire Materiaux et Microelectronique de Provence, Universite de Provence, France Silicon Processing and Device Technology Division, IMEC, Belgium