1st Edition

Vacuum Technique

By L.N. Rozanov Copyright 2002
    360 Pages
    by CRC Press

    360 Pages
    by CRC Press

    Vacuum technology finds itself in many areas of industry and research. These include materials handling, packaging, gas sampling, filtration, degassing of oils and metals, thin-film coating, electron microscopy, particle acceleration, and impregnation of electrical components. It is vital to design systems that are appropriate to the application, and with so many potential solutions this can become overwhelming.

    Vacuum Technique provides an overview of vacuum technology, its different design methodologies, and the underlying theory. The author begins with a summary of the properties of low-pressure gases, then moves on to describe mathematical modeling of gas transfer in the vacuum system, the operation of pumps and gauges, computer-aided synthesis and analysis of systems, and the design of different vacuum systems. In particular, the author discusses the structure and characteristics of low, middle, high, and superhigh vacuum systems, as well as the characteristics of joints, materials, movement inputs, and all aspects of production technology and construction standards.

    Using specific examples rather than describing the various elements, Vacuum Technique supplies engineers, technicians, researchers, and students with needed expertise and a comprehensive guide to designing, selecting, and using an appropriate vacuum system for a specific purpose.

    INTRODUCTION
    The Concept of Vacuum
    History of Vacuum Engineering
    Applications of Vacuum instruments
    PROPERTIES OF GASES AT LOW PRESSURES
    Gas Pressure
    Velocity Distribution of Gas Molecules
    Mean Free Path Length
    Interaction of Gas Molecules With Surfaces
    Adsorption Time
    Saturation Pressure
    Surface Coverage With Gas Molecules
    Gas Dissolution in Solids
    Electrical Phenomena
    Test Questions
    THEORY
    Degrees of Vacuum
    Transport Phenomena
    Thermal Equilibrium of Pressures
    Calculation of Gas Flow by the Method of Continuum mechanics
    Calculation of Gas Flow Using the Method of Integral Angular Coefficients
    Modeling of Gas Flow
    Gas Evolution
    Basic Equation
    Test Questions
    MEASUREMENT OF VACUUM
    Classification of Measurement Methods
    Mechanical Methods
    Thermal Methods
    Electrical Methods of Total Pressure Measurement
    Electrical Methods of Measuring Partial Pressure
    Sorption Methods
    Calibration of Transducers
    Measurement of Gas Flows
    Leak Detection Methods
    Test Questions
    MECHANICAL METHODS OF VACUUM PRODUCTION
    General Characteristic of Vacuum Pumps
    Volume Pumping
    Design of Displacement Pumps
    Molecular Pumping
    Design of Molecular Pumps
    Vapor Jet Pumping
    Working Liquids
    Design of Vapor Jet Pumps
    Traps
    Test Questions
    PHYSICO-CHEMICAL METHODS OF VACUUM PRODUCTION
    General
    Ion Pumping
    Chemisorption Pumping
    Evaporation Pumps
    Cryocondensation Pumping
    Cryoadsorption Pumping
    Cryogenic Pumps
    Getter-Ion Pumping
    Getter-Ion Pumps
    Test Questions
    ANALYSIS OF THE VACUUM SYSTEMS
    Typical Vacuum Systems
    Calculation of Gas Load
    Equations of Steady-State Pumping
    Connections of System Elements and Pumped Objects
    Connection of Pumps
    Time of Pumping
    Cost of Pumping
    Verifying Calculation of a Vacuum System
    An Example of Verifying Calculation
    Test Questions
    DESIGN OF VACUUM SYSTEMS
    Database of Vacuum System Elements
    Structural Design of Vacuum Systems Using the Method of Selecting Variants
    Structural Design Using Typical Pattern
    Parametric Design of a Vacuum System Using the Utilization Coefficient of Vacuum Pump
    Multiparametric Design of a Vacuum System
    Schematic Connections and Assembly
    Projecting Calculation of a Vacuum System
    Example of Projecting Calculation of a Vacuum System in Steady-State Mode
    Test Questions
    CONSTRUCTION OF VACUUM SYSTEMS
    Materials of Vacuum Engineering
    Non-Detachable Connections
    Detachable Vacuum Connections
    Vacuum Pipelines
    Devices for Transmitting Movement to Vacuum
    Electrical Vacuum Contacts
    Vacuum Valves
    Test Questions
    PROBLEMS
    Properties of Gases at Low Temperatures
    Theory of Vacuum Engineering
    Calculation of Vacuum Systems
    REFERENCE TABLES
    APPENDIX
    Derivation of the Maxwell-Boltzmann Function
    Average Velocity
    The Equation of Polymolecular Adsorption
    The Equation of Gas Flow Through an Aperture in Viscous Flow Mode
    REFERENCES
    INDEX

    Biography

    Professor L N Rozanov is Head of the Department of Information Machinery Technology of St Petersburg Technical University. His research interests include adsorption pumps, leak detection and computer-aided design of vacum systems.