1st Edition

Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

By Marc J. Madou Copyright 2011
    656 Pages 745 Color Illustrations
    by CRC Press

    Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. 

    Topics include:

    • Crystallography and the crystalline materials used in many semiconductor devices
    • Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS
    • Single crystal Si properties that conspire to make Si so important
    • Optical properties of bulk 3D metals, insulators, and semiconductors
    • Effects of electron and photon confinement in lower dimensional structures
    • How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics
    • Metamaterials and how they could make for perfect lenses, changing the photonic field forever
    • Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior
    • Electromechanical and optical analytical processes in miniaturized components and systems 

    The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.

    Historical Note: The Ascent of Silicon, MEMS, and NEMS
    Crystallography
    Introduction
    Bravais Lattice, Unit Cells, and the Basis
    Point Groups and Space Groups
    Miller Indices
    X-Ray Analysis
    Reciprocal Space, Fourier Space, k-Space, or Momentum Space
    Brillouin Zones
    Nothing Is Perfect
    Acknowledgments
    Appendix 2A: Plane Wave
    Equations
    Questions
    Further Reading
    Reference

    Quantum Mechanics and the Band Theory of Solids
    Introduction
    Classical Theory Starts Faltering
    Quantum Mechanics to the Rescue
    Beyond Schrödinger’s Equation

    Silicon Single Crystal Is Still King
    Introduction
    Si Crystallography
    Single-Crystal Structure and Conductivity
    Single-Crystal Si Growth
    Doping of Si
    Oxidation of Silicon
    Si-Based Electronic Devices
    Physicochemical Properties of Si
    Appendix 4A: Some Properties of Error Functions and Complementary Error Functions
    Questions
    Further Reading
    References

    Photonics
    Introduction
    The Nature of Light
    Diffraction and Image Resolution
    Refraction
    Reflectance and Total Internal Reflectance
    Light Polarization
    Maxwell’s Equations
    Beyond Maxwell
    Optical Properties of Materials
    Light Interaction with Small Particles
    Comparing Photons with Electrons—Photonic Crystals
    The μ-ε Quadrant and Metamaterials
    Lasers
    Questions
    References

    Fluidics
    Introduction
    Macroscale Laws for Fluid Flow
    Breakdown of Continuum Theory in Fluidics
    Forces at Interfaces
    Mixing, Stirring, and Diffusion in Low Reynolds Number Fluids
    Chemical Reactions in Microchambers—Microreactors
    Fluid Propulsion
    Electrowetting
    Centrifugal Fluidic Platform—CD
    Fluidics
    Scaling in Analytical Separation
    Equipment
    Acknowledgments
    Questions
    Further Reading
    References

    Electrochemical and Optical Analytical Techniques
    Introduction
    Intermolecular Forces
    Electrochemistry
    Optical Spectroscopy
    Comparison of Optical versus
    Electrochemical Sensors
    Questions
    References

    Biography

    Marc J. Madou