1st Edition
Capacitance Spectroscopy of Semiconductors
Capacitance spectroscopy refers to techniques for characterizing the electrical properties of semiconductor materials, junctions, and interfaces, all from the dependence of device capacitance on frequency, time, temperature, and electric potential. This book includes 15 chapters written by world-recognized, leading experts in the field, academia, national institutions, and industry, divided into four sections: Physics, Instrumentation, Applications, and Emerging Techniques. The first section establishes the fundamental framework relating capacitance and its allied concepts of conductance, admittance, and impedance to the electrical and optical properties of semiconductors. The second section reviews the electronic principles of capacitance measurements used by commercial products, as well as custom apparatus. The third section details the implementation in various scientific fields and industries, such as photovoltaics and electronic and optoelectronic devices. The last section presents the latest advances in capacitance-based electrical characterization aimed at reaching nanometer-scale resolution.
Introduction to Capacitance Spectroscopy
Jian V. Li and Jennifer T. Heath
Admittance Spectroscopy
Thomas Walter
Deep-Level Transient Spectroscopy
Johan Lauwaert and Samira Khelifi
Capacitance-Voltage and Drive-Level-Capacitance Profiling
Jennifer T. Heath
Basic Techniques for Capacitance and Impedance Measurements
Giorgio Ferrari and Marco Carminati
Advanced Instrumentation for High-Resolution Capacitance and Impedance Measurements
Giorgio Ferrari and Marco Carminati
Time-Domain-Based Impedance Detection
Uwe Pliquett
Comparison of Capacitance Spectroscopy for PV Semiconductors
Adam Halverson
Capacitive Techniques for the Characterization of Organic Semiconductors
Dario Natali and Mario Caironi
Capacitance Spectroscopy for MOS Systems
Salvador Duenas and Helena Castan
Capacitance Spectroscopy in Single-Charge Devices
Alessandro Crippa, Marco Tagliaferri, and Enrico Prati
Scanning Capacitance Microscopy
Jian V. Li and Chunsheng Jiang
Probing the Dielectric Constant at the Nanoscale with Scanning Probe Microscopy
Laura Fumagalli and Gabriel Gomila
SPM-Based Capacitance Spectroscopy
Jian V. Li, Giorgio Ferrari, and Chunsheng Jiang
Scanning Microwave Microscopy
Yongtao Cui and Eric Ma
Biography
Jian V. Li holds a PhD in electrical engineering from the University of Illinois at Urbana-Champaign, USA. Since 2017, he has been an associate professor at National Cheng Kung University, Taiwan. He specializes in the characterization of semiconductor materials and devices—especially properties concerning defects, carrier recombination, and interfaces—with capacitance spectroscopy and other electrical–optical techniques.
Giorgio Ferrari obtained his PhD in electronics engineering in 2003 from the Politecnico di Milano, Italy. Since 2005, he has been an assistant professor of electronics at the Politecnico di Milano. His research concerns the development of novel integrated instrumentation to probe electrical properties of materials, devices, and biosamples at the nanoscale.
"This book provides a comprehensive review of all the important aspects of capacitance spectroscopy techniques, including fundamental principles, instrumentation overview, practical applications, and the latest emerging techniques. It is well organized and easy to read. Its rich information is useful for both professional researchers and undergraduate- and graduate-level students in physics, chemistry, and materials science and engineering." – Prof. Yanfa Yan, University of Toledo, USA