2nd Edition
Nano- and Micro-Electromechanical Systems Fundamentals of Nano- and Microengineering, Second Edition
Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.
Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.
Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.
Introduction and Overview: From Micro- to Nano- and Beyond to Stringo-Scale
Introductory Definitions to the Subjects
Current Developments and Needs for Coherent Revolutionary Developments
Societal Challenges and Implications
NANO- AND MICROSCALE SYSTEMS, DEVICES, AND STRUCTURES
Sizing Features: From Micro- to Nano-, and from Nano- to Stringo-Scale MEMS and NEMS Definitions
Introduction to Taxonomy of Nano- and Microsystem Synthesis and Design
Introduction to Design and Optimization of Nano- and Microsystems in the Behavioral Domain
NANO- AND MICROSYSTEMS: CLASSIFICATION AND CONSIDERATION
Biomimetics, Biological Analogies,and Design of NEMS and MEMS
Micro- and Nanoelectromechanical Systems: Scaling Laws and Mathematical Modeling
MEMS Examples and MEMS Architectures
Introduction to Microfabrication and Micromachining
FUNDAMENTALS OF MICROFABRICATION AND MEMS FABRICATION TECHNOLOGIES
Introduction and Description of Basic Processes in Microfabrication
Microfabrication and Micromachining of ICs, Microstructures, and Microdevices
MEMS Fabrication Technologies
DEVISING AND SYNTHESIS OF NEMS AND MEMS
Motion Nano- and Microdevices: Synthesis and Classification
Microaccelerometers as Microelectromechanical Microdevices
Optimization with Application to Synthesis and Classification Solver
Nanoengineering Bioinformatics and Its Application
MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS AND DEVICES
Introduction to Modeling, Analysis, and Simulation
Basic Electromagnetics with Applications to MEMS and NEMS
Model Developments of Micro- and Nanoactuators Using Electromagnetics
Classical Mechanics and Its Application to MEMS
Equations of Motions
Direct-Current Micromachines
Simulation of MEMS in the MATLAB Environment with Examples
Induction Micromachines
Synchronous Micromachines
Permanent-Magnet Stepper Micromotors
Piezotransducers
Modeling of Electromagnetic Radiating Energy Microdevices
Thermodynamics, Thermoanalysis, and Heat Equation
QUANTUM MECHANICS AND ITS APPLICATIONS
Atomic Structures and Quantum Mechanics
Molecular and Nanostructure Dynamics
Quantum Mechanics and Energy Bands
MOLECULAR AND CARBON NANOELECTRONICS
Past, Current, and Future of Electronics with Prospects for 2020 and Beyond
Fundamentals
Carbon Nanotubes
Carbon-Based Nanoelectronics and Three-Dimensional Nano-ICs
CONTROL OF MEMS AND NEMS
Continuous-Time and Discrete-Time MEMS
Analog Control of MEMS Using Transfer Functions
The Hamilton-Jacobi Theory and Optimal Control of MEMS and NEMS
Sliding Mode Control of MEMS and NEMS
Constrained Control of Nonlinear MEMS and NEMS
Optimization of Microsystems Using Nonquadratic Performance Functionals
Hamilton-Jacobi Theory and Quantum Mechanics
Lyapunov Stability Theory in Analysis and Control of MEMS and NEMS
Digital Control of MEMS and NEMS
EXAMPLES IN SYNTHESIS, ANALYSIS, DESIGN AND FABRICATION OF MEMS
Introduction
Analysis of Energy Conversion and MEMS Performance from Materials and Fabrication Viewpoints
Analysis of Translational Microtransducers
Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control
Microfabrication Topics
Magnetization Dynamics of Thin Films
Microstructures and Microtransducers with Permanent-Magnet: Micromirror Actuators
Reluctance Electromagnetic Micromotors
Micromachined Polycrystalline Silicon Carbide Micromotors
Axial Electromagnetic Micromotors
Cognitive Computer-Aided Design of MEMS
Biography
Sergey Edward Lyshevski
“The theoretical equations for each of the NEMS/MEMS characteristics and applications are painstakingly derived and nicely illustrated with generalized charts and schematic drawings… This second edition offers a broader coverage of topics and depth than the author’s first edition…”
—Micro Nano Newsletter, Dec. 2005, Vol. 10 No. 12"This would be an excellent book for a senior undergraduate or graduate two-semester course in materials science or electrical engineering. It not only presents a good overview of important areas of development in micro and nano technology, but it also contains many examples, homework problems, and lots of references for further study at the end of each chapter."
– In IEEE Electrical Insulation Magazine, May/June 2008, Vol. 24, No. 3
