Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water

1st Edition

Ohmi

CRC Press
December 20, 2019 Forthcoming
Reference - 944 Pages
ISBN 9780367402341 - CAT# K449784

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Summary

Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int

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