Run-to-Run Control in Semiconductor Manufacturing

1st Edition

James Moyne, Enrique del Castillo, Arnon M. Hurwitz

CRC Press
Published November 30, 2000
Reference - 368 Pages
ISBN 9780849311789 - CAT# 1178

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Summary

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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