Radio-Frequency Capacitive Discharges

Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko

February 24, 1995 by CRC Press
Reference - 304 Pages
ISBN 9780849386442 - CAT# 8644

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Features

  • First book available on this subject
  • Provides material in an easy-to-understand style for readers at all levels of expertise
  • Offers deep insight into physical phenomena
  • Includes the first description of the application of rf discharges for gas laser exitation
  • Summary

    The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings.

    Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.