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Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,
Table of Contents
Introduction. Phenomenological Description of the Charged Particle Transport. Macroscopic Plasma Characteristics. Elementary Processes in Gas Phase and on Surfaces. The Boltzmann Equation and Transport Equations of Charged Particles. General Properties of Charged Particle Transport in Gases. Modeling of Nonequilibrium (Low-Temperature) Plasmas. Numerical Procedure of Modeling. Capacitively Coupled Plasma. Inductively Coupled Plasma. Magnetically Enhanced Plasma. Plasma Processing and Related Topics. Index.
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