Plasma Electronics: Applications in Microelectronic Device Fabrication

1st Edition

Toshiaki Makabe, Zoran Lj. Petrovic

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CRC Press
Published March 27, 2006
Reference - 360 Pages
ISBN 9780429193316 - CAT# KE87816

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Summary

Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,

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