Plasma Deposited Thin Films

1st Edition

Mort

CRC Press
Published December 13, 2017
Reference - 253 Pages
ISBN 9781315896717 - CAT# K348005

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Summary

In Summary, the objective of this book is to present in one volume a review of the plasma deposition process and the present understanding of the most important and widely used plasma deposited thin film materials, devices and their applications.

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