Physics of Radiofrequency Capacitive Discharge

1st Edition

V. P. Savinov

CRC Press
Published May 21, 2018
Reference - 322 Pages - 179 B/W Illustrations
ISBN 9781138600805 - CAT# K387921

For Instructors Request Inspection Copy

USD$229.95

Add to Wish List
FREE Standard Shipping!

Summary

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

Instructors

We provide complimentary e-inspection copies of primary textbooks to instructors considering our books for course adoption.

Request an
e-inspection copy

Share this Title