Particle Control for Semiconductor Manufacturing

1st Edition

Donovan

CRC Press
Published January 26, 1990
Reference - 480 Pages
ISBN 9780824782429 - CAT# DK4199

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Summary

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

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