Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma

1st Edition

Nikolay L. Kazanskiy, Vsevolod A. Kolpakov

CRC Press
Published March 23, 2017
Reference - 211 Pages - 123 B/W Illustrations
ISBN 9781138197282 - CAT# K31257

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Summary

This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.

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