Optical Inspection of Microsystems, Second Edition

2nd Edition

Wolfgang Osten

CRC Press
Published June 25, 2019
Reference - 570 Pages - 25 Color & 477 B/W Illustrations
ISBN 9781498779470 - CAT# K29872

For Instructors Request Inspection Copy


Add to Wish List
FREE Standard Shipping!


Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.

Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts.

Supplying effective tools for increased quality and reliability, this book

  • Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems
  • Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques
  • Offers numerous practical examples and illustrations
  • Includes calibration of optical measurement systems for the inspection of MEMS
  • Presents the characterization of dynamics of MEMS


We provide complimentary e-inspection copies of primary textbooks to instructors considering our books for course adoption.

Request an
e-inspection copy

Share this Title