Nanofabrication by Ion-Beam Sputtering: Fundamentals and Applications

1st Edition

Tapobrata Som, Dinakar Kanjilal

Pan Stanford
Published November 27, 2012
Reference - 356 Pages - 28 Color & 124 B/W Illustrations
ISBN 9789814303750 - CAT# N10583

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Summary

Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attractive. This book reviews various fascinating results, understand the underlying physics of ion induced pattern formation, to highlight the potential applications of the patterned surfaces, and to explore the patterning behavior by different irradiation parameters in order to create desired surface morphologies on specific materials.

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