Nanofabrication by Ion-Beam Sputtering: Fundamentals and Applications

1st Edition

Tapobrata Som, Dinakar Kanjilal

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Pan Stanford
Published November 27, 2012
Reference - 356 Pages
ISBN 9780429086540 - CAT# KE76034

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Summary

Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attracti

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