October 21, 2016
by CRC Press
Reference - 299 Pages - 24 Color & 226 B/W Illustrations
ISBN 9781498725576 - CAT# K25784
Series: Optical Sciences and Applications of Light
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This book is designed to introduce typical cleanroom processes, techniques, and their fundamental principles. It is written for the practicing scientist or engineer, with a focus on being able to transition the information from the book to the laboratory. Basic theory such as electromagnetics and electrochemistry is described in as much depth as necessary to understand and explain the current practice and their limitations. Examples from various areas of interest will be covered, such as the fabrication of photonic devices including photo detectors, waveguides, and optical coatings, which are not commonly found in other fabrication texts.
Introduction to Micro and Nano-Fabrication. Vacuum and Plasma technology. Physical vapor deposition. Chemical vapor deposition. Optical thin film coatings. Substrate materials. Photoresists and photolithography. Wet chemical etching. Plasma etching. Semiconductor Doping & annealing. Semiconductor metrology. Packaging. MEMS and microfluidic device fabrication. Fabrication examples.
"Dr. Sarangan has done an excellent job of providing a practical text for scientists and technologists interested in the principles of nanofabrication. This book would serve as a relatively comprehensive reference text for anyone beginning the journey of creating solutions in the science of very small things."
—Greg Peake, Sandia National Laboratories, Albuquerque, New Mexico, USA
"This book is beneficial to the community of nanoscience and nanotechnology."
— Yongyuan Jiang, Harbin Institute of Technology, China
"Overall, the book is an excellent source for new, as well as, highly experienced engineers in the field of device fabrication. It presents easy to understand descriptions of very complicated processes and techniques. The numerical examples offer tremendous insight into what is physically being done during device fabrication. Dr. Saragan has done an excellent service to the community by authoring this text."
— Ronald A. Coutu, Jr., Marquette University, Milwaukee, Wisconsin, USA
"Graduate students as well as researchers working in cleanrooms developing semiconductors or those working in a cleanroom will be able to use this book as a go-to reference source for many commonly used semiconductor fabrication methods. This is a convenient source of information that is well written and provides lots of useful fabrication data and tips. It will serve as a general reference text on this subject matter."
—IEEE Electrical Insulation, November/December 2017