Nanofabrication Handbook

Stefano Cabrini, Satoshi Kawata

February 24, 2012 by CRC Press
Reference - 546 Pages - 463 B/W Illustrations
ISBN 9781420090529 - CAT# 90526


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  • Introduces the central concepts of nanofabrication
  • Explains how to resolve problems that arise in the experimental phase
  • Covers a host of techniques, including electron beam lithography, focused ion beam, plasma-assisted pattern transfer, optical lithography, and soft x-ray lithography
  • Describes new and emerging methods, such as nanoimprint lithography, scanning probe lithography, two-photon lithography, self assembly, plasmonic nanolithography, and deterministic doping
  • Discusses how nanofabrication processes are used in NEMS, protein/cell analysis, photonics, and electronics


While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research.

Helping readers to select the proper fabricating technique for their experiments, the book provides a broad vision of the most critical problems and explains how to solve them. It includes basic definitions and introduces the main underlying concepts of nanofabrication. The book also discusses the major advantages and disadvantages of each approach and offers a wide variety of examples of cutting-edge applications.

Each chapter focuses on a particular method or aspect of study. For every method, the contributors describe the underlying theoretical basis, resolution, patterns and substrates used, and applications. They show how applications at the nanoscale require a different process and understanding than those at the microscale. For each experiment, they elucidate key solutions to problems relating to materials, methods, and surface considerations.

A complete resource for this rapidly emerging interdisciplinary field, this handbook provides practical information for planning the experiments of any project that employs nanofabrication techniques. It gives readers a foundation to enter the complex world of nanofabrication and inspires the scientific community at large to push the limits of nanometer resolution.


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