This book provides comprehensive coverage of the basic theory, calculation methods and optimization of high and ultra-high vacuum systems and equipment. After an explication of molecular kinetic theory as applied to the problems of vacuum technology, the book examines methods (including the Monte Carlo method) of analyzing molecular flow in nonequilibrium systems. It goes on to describe the parameters for separate vacuum system components, and ends with a section on molecular flow in structures with absorbing walls.
Preface 1 The Fundamental Relationships of Molecular Kinetic Theory as it Applies to Problems in Vacuum Technology 2 Methods of Analyzing Molecular Flow in Nonequilibrium Systems with an Arbitrary Geometrical Structure 3 Molecular Flow in Typical Vacuum System Components 85 4 Molecular Flow in Structures with Adsorbing Walls
Biography
G.L. Saksaganskii D.V. Efremov Scientific Research Institute of Electrophysical Apparatus, Leningrad, USSR
