Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

1st Edition

Saburo Nonogaki, Ueno Takumi, Toshio Ito

CRC Press
Published June 25, 1998
Reference - 336 Pages
ISBN 9780824799519 - CAT# DK5562

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Summary

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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