Explores the technology of fabrication and manufacturing of engineering materials at the micro- and nanoscale Describes the construction of microscale components using established lithographic techniques and provides examples of LiGA and deep x-ray lithography Focuses on bulk and surface micromachining techniques used for producing features Explains processes for shaping materials to produce mass products and the fabrication of master molds Introduces the concepts of deposition of thin solid films and pulsed water drop machining Contains chapters by internationally renowned experts presenting state-of-the-art information
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing
focuses on the technology of fabrication and manufacturing of engineering materials at these levels.
The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing.
This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Table of Contents
Micro- and Nanofabrication, Mark J. Jackson
Microfabrication Using X-Ray Lithography, David W. L. Tolfree and Mark J. Jackson
Etching, Machining, and Molding High-Aspect
Ratio Microstructures, Mark J. Jackson and Grant M. Robinson
The Size Effect in Micromachining, Milton C. Shaw and Mark J. Jackson
Mechanical Micromachining, Mark J. Jackson and Sam B. McSpadden
Precision Micro- and Nanogrinding, Vellore C. Venkatesh, Sudin Izman, and Mark J. Jackson
CVD Diamond Technology for Microtools, NEMS,
and MEMS Applications, Waqar Ahmed, Htet Sein, and Mark J. Jackson
Laser-Based Micro- and Nanofabrication, Mark J. Jackson and Grant M. Robinson
Pulsed Water Drop Micromachining, Mark J. Jackson and Luke J. Hyde
Diamond Nanogrinding, Mark J. Jackson, Luke J. Hyde, and Grant M. Robinson
Theory, Methods, and Implementation, Kai Cheng, Xun Luo, and Mark J. Jackson
Nanocrystalline Diamond: Deposition Routes and Applications, Nasar Ali, Juan Gracio, Mark J. Jackson, and Waqar Ahmed
Commercialization Issues of Micro-Nano Technology, David W. L. Tolfree
The Future of Micro- and Nanomanufacturing, Mark J. Jackson Index