Microelectronics to Nanoelectronics: Materials, Devices & Manufacturability

Anupama B. Kaul

August 24, 2012 by CRC Press
Reference - 464 Pages - 60 Color & 171 B/W Illustrations
ISBN 9781466509542 - CAT# K14730


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  • Describes the state of the art in Si transistor technology in the context of Moore’s law
  • Explores how continued scaling impacts transistor performance
  • Assesses the effect of harsh environments, including radiation, that contribute to semiconductor transistor failure
  • Covers the design, modeling, and analysis of nano-electro-mechanical-systems (NEMS)-based integrated circuits (ICs)
  • Addresses the design, fabrication, and characterization of NEM resonators used as sensitive mass detectors for biological sensing applications
  • Provides examples of the latest developments in nanofabrication derived from both the top-down and the bottom-up approach
  • Details approaches used to integrate single-walled carbon nanotubes (SWCNTs) with complimentary metal-oxide-semiconductor (CMOS) circuitry
  • Discusses CNTs and the methods used to integrate them within the well-established semiconductor processing platform
  • Talks about the broader applications of nanoengineered materials in the areas of electronics, biology, and energy harnessing


Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices and Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena.

Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of California Institute of Technology’s Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul’s considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry.

Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy’s Sandia National Laboratory. Offering something for everyone, from students to scientists to entrepreneurs, this book showcases the broad spectrum of cutting-edge technologies that show significant promise for electronics and related applications in which nanotechnology plays a key role.

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