1st Edition
Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit From Mega-Bit to Giga-Bit
Edited By Hiroyuki Tango
Copyright 1998
293 Pages
by
CRC Press
310 Pages
by
CRC Press
310 Pages
by
CRC Press
Also available as eBook on:
This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies—the longstanding technology driver of Si ULSI—as they advance from the 1 Kbit to the Gbit DRAM era.
1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7.
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation
Biography
Hiroyuki Tango