Manufacturing Techniques for Microfabrication and Nanotechnology

1st Edition

Marc J. Madou

CRC Press
Published June 13, 2011
Textbook - 670 Pages - 625 Color Illustrations
ISBN 9781420055191 - CAT# 55194

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Summary

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.