Provides complete coverage of the fundamental concepts and theoretical underpinnings of MEMS technologiesEmphasizes the physical phenomena that dominate at the microscaleComprises chapters from leading experts from around the worldUpdates existing chapters where necessary and includes two completely new chapters on microscale hydrodynamics and lattice Boltzmann simulationsIncludes numerous case studies, examples, figures, and illustrations
As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.
MEMS: Introduction and Fundamentals comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
Table of Contents
Introduction; Mohamed Gad-el-Hak
Scaling of Micromechanical Devices; William Trimmer and Robert H. Stroud
Mechanical Properties of MEMS Materials; William N. Sharpe, Jr.
Flow Physics; Mohamed Gad-el-Hak
Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains; Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram
Molecular-Based Microfluidic Simulation Models; Ali Beskok
Hydrodynamics of Small-Scale Internal Gaseous Flows; Nicolas G. Hadjiconstantinou
Burnett Simulations of Flows in Microdevices; Ramesh K. Agarwal and Keon-Young Yun
Lattice Boltzmann Simulations of Slip Flows in Microchannels; Ramesh K. Agarwal
Liquid Flow in Microchannels; Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho
Lubrication in MEMS; Kenneth Breuer
Physics of Thin Liquid Films; Alexander Oron
Bubble/Drop Transport in Microchannels; Hsueh-Chia Chang
Fundamentals of Control Theory; J. William Goodwine
Model-Based Flow Control for Distributed Architectures; Thomas R. Bewley
Soft Computing in Control; Mihir Sen and Bill Goodwine