1st Edition

Introduction to Optical Metrology

By Rajpal S. Sirohi Copyright 2016
    449 Pages 284 B/W Illustrations
    by CRC Press

    Introduction to Optical Metrology examines the theory and practice of various measurement methodologies utilizing the wave nature of light. The book begins by introducing the subject of optics, and then addresses the propagation of laser beams through free space and optical systems. After explaining how a Gaussian beam propagates, how to set up a collimator to get a collimated beam for experimentation, and how to detect and record optical signals, the text:

    • Discusses interferometry, speckle metrology, moiré phenomenon, photoelasticity, and microscopy
    • Describes the different principles used to measure the refractive indices of solids, liquids, and gases
    • Presents methods for measuring curvature, focal length, angle, thickness, velocity, pressure, and length
    • Details techniques for optical testing as well as for making fiber optic- and MEMS-based measurements
    • Depicts a wave propagating in the positive z-direction by ei(ωt – kz), as opposed to ei(kz – ωt)

    Featuring exercise problems at the end of each chapter, Introduction to Optical Metrology provides an applied understanding of essential optical measurement concepts, techniques, and procedures.

    Introduction to Optics
    Introduction
    Law of Reflection
    Law of Refraction
    Interference
    Diffraction
    Polarization
    Fresnel Equations
    Thin Film Optics
    Optical Components
    Refraction at Curved Interface
    Paraxial Optics
    Problems

    Laser Beams
    Gaussian Beams
    The ABCD Law for Gaussian Beams
    Laser Collimator
    Vortex Beams
    Bessel Beams
    Problems

    Sources, Detectors, and Recording Media
    Introduction
    Radiometric Units
    Blackbody
    Light Sources
    Detectors
    Recording Media
    Image Detectors
    Spatial Light Modulators
    Problems

    Interferometry
    Introduction
    Early History
    Generation of Coherent Waves/Sources
    Fringe Patterns
    Some More Interferometers
    Phase Shifting
    Problems

    Techniques
    Holography and Hologram Interferometry
    Speckle Phenomenon, Speckle Photography, and Speckle Interferometry
    The Moiré Phenomena
    Photoelasticity
    Microscopy
    Problems

    Measurement of Refractive Index
    Introduction
    Spectrometer
    Goniometer
    Methods Based on the Measurement of Critical Angle
    Measurement of Brewster Angle
    Ellipsometry
    Spectral Transmission Measurement
    Interferometry
    Problems

    Measurement of Radius of Curvature and Focal Length
    Introduction
    Measurement of Radius of Curvature
    Scanning Profilometry
    Radius of Curvature Measurement by Talbot Interferometry
    Measurement of Focal Length
    Moiré Deflectometry
    Problems

    Optical Testing
    Testing of a Flat Surface
    Testing of Spherical Surfaces
    Testing of Aspherical Surfaces
    Oblique Incidence Interferometer
    Shear Interferometry
    Long Wavelength Interferometry
    Problems

    Angle Measurement
    Definition of an Angle
    Autocollimator
    Goniometer
    Interferometry
    Problems

    Thickness Measurement
    Triangulation-Based Probe
    Spectral Reflectometry
    Ellipsometry
    Interferometry
    Low Coherence Interferometry
    Confocal Microscopy
    Light Section Microscopy
    Problems

    Measurement of Velocity
    Introduction
    Scattering from a Moving Particle-Doppler Shift
    Scatter Light Beams Anemometry
    Multichannel LDA Systems
    Signal Processing
    Particle Image Velocimetry
    Measurement of Very High Velocity
    Problems

    Pressure Measurement
    Pressure Sensitive Paint
    Measurement of Pressure with Photoelastic Material
    Ruby Pressure Standard
    Fabry-Perot Etalon as Pressure Sensor
    Problems

    Fiber Optic- and MEM-Based Measurements
    Introduction
    Intensity Modulation
    Phase Modulation
    Pressure Sensor: Membrane Type
    Bragg Grating Sensors
    Polarization Maintaining Single-Mode Fibers
    Fiber Optic Biosensors
    Problems

    Length Measurement
    Introduction
    Measurement of Gauge Blocks and Slip Gauges
    Gauge Block Interferometry: Comparison with a Standard
    Comb Generation and Gauge Block Calibration
    Modulated Frequency-Displacement Sensor
    Displacement Measurement with Interferometry
    Angle Interferometer
    The Moiré Technique for Displacement Measurement
    Displacement Distribution Measurement
    Moiré Techniques
    Digital Image Correlation
    Problems

    Biography

    Rajpal S. Sirohi, Ph.D, is currently chair professor of the Physics Department at Tezpur University, India, and senior editor of Optical Engineering. Previously, he was director of the Indian Institute of Technology Delhi; vice-chancellor of Barkatullah University, Bhopal; vice-chancellor of Shobhit University, Meerut; and vice-chancellor of Amity University, Jaipur. He also served in various capacities at the Indian Institute of Science, Bangalore; Indian Institute of Technology Madras, Chennai; Case Western Reserve University, Cleveland, Ohio, USA; Rose-Hulman Institute of Technology, Terre Haute, Indiana, USA; Institute for Advanced Studies, University of Malaya, Malaysia; University of Namibia; National University of Singapore; and École Polytechnique Fédérale de Lausanne, Switzerland. Widely published and highly decorated, Professor Sirohi is or has been a fellow, honorary fellow, invited fellow, member, board member, and former president of numerous scientific academies, associations, committees, societies, and journals.

    "A good book for students and professionals to learn both basic and practical aspects of optical metrology."
    —Mitsuo Takeda, Center for Optical Research and Education, Utsunomiya University, Japan

    "The theory and practice of optical metrology is equally weighted in this book, an ideal combination for the instructor, student, and researcher."
    —Ramen Bahuguna, San Jose State University, California, USA

    "The author’s way of writing/explaining is very well adapted to students and practical-thinking persons. The didactics show the long experience of the author."
    —W. Osten, University Stuttgart, Germany