Handbook of Silicon Semiconductor Metrology

1st Edition

Alain C. Diebold

CRC Press
Published June 29, 2001
Reference - 896 Pages
ISBN 9780824705060 - CAT# DK1758

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Summary

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

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