Handbook of Optical Metrology: Principles and Applications

Toru Yoshizawa

May 31, 2017 by CRC Press
Reference - 744 Pages - 607 B/W Illustrations
ISBN 9781138112087 - CAT# K35138


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  • Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements
  • Discusses interferometry, holography, and speckle methods and applications
  • Explains moire metrology and the optical heterodyne measurement method
  • Delves into the specifics of diffraction, scattering, polarization, and near-field optics
  • Considers applications for measuring length and size, displacement. straightness and parallelism, flatness, and three-dimensional shapes
  • Explores advanced methods such as fringe analysis, photogrammetry, polarimetry, birefringence measurement, and ellipsometry
  • Discusses advances in optical thin film and coatings, and film surface and thickness profilometry


The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals.

Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications.

With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.


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