Handbook of Optical Metrology: Principles and Applications, Second Edition

2nd Edition

Toru Yoshizawa

CRC Press
Published April 9, 2015
Reference - 919 Pages - 771 B/W Illustrations
ISBN 9781466573598 - CAT# K16659

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Summary

Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text:

  • Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements
  • Addresses interferometry, holography, and speckle methods and applications
  • Explains Moiré metrology and the optical heterodyne measurement method
  • Delves into the specifics of diffraction, scattering, polarization, and near-field optics
  • Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes

This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

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