Handbook of Optical Dimensional Metrology

1st Edition

Kevin Harding

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CRC Press
Published April 19, 2016
Reference - 506 Pages
ISBN 9780429064739 - CAT# KE74797

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Summary

Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods