Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

3rd Edition

Marc J. Madou

CRC Press
Published August 1, 2011
Textbook - 1992 Pages - 1887 Color Illustrations
ISBN 9780849331800 - CAT# 3180


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  • Features recent developments in nano- and micromanufacturing techniques, DNA and protein arrays, fluidics, photonics, and actuators
  • Provides theoretical foundation for understanding the science behind MEMS and NEMS
  • Explores the latest manufacturing techniques, including rapid prototyping and a wide variety of novel nanomanufacturing approaches
  • Offers thorough coverage of Bio-MEMS and Bio-NEMS
  • Contains color illustrations, worked-out example problems, and end-of-chapter problems

Solutions manual, PowerPoint lecture slides, and electronic figure files available upon qualifying course adoption.


Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.