Emerging Lithographic Technologies for Nanopatterning

Ampere A. Tseng, Walt Trybula

March 16, 2010 by CRC Press
Reference - 700 Pages - 100 B/W Illustrations
ISBN 9780849374210 - CAT# 7421

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  • Explores conventional and emerging technologies for fabricating nanoscale structures, devices, and systems
  • Features contributions from renowned professionals
  • Includes examples and case studies in each chapter
  • Covers next-generation and scanning probe microscopy lithography
  • Summary

    As devices become progressively smaller, nanofabrication is increasingly essential for the realization of nanotechnologies that require such structures. Emerging Lithographic Technologies for Nanopatterning reviews conventional and non-conventional technologies for fabricating semiconductor circuits, particularly on microchips. Emphasizing multidisciplinary principles, methodologies, and practical applications, coverage includes emerging techniques for next-generation semiconductor lithography, scanning probe microscope lithography, self-assembly, imprint lithography, and techniques specifically developed for making nanoscale particles, wires, and tubes as well as molecular circuits and devices.