1st Edition

Handbook of Optical Metrology Principles and Applications

Edited By Toru Yoshizawa Copyright 2009
    744 Pages 607 B/W Illustrations
    by CRC Press

    The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals.

    Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications.

    With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.

    Fundamentals of Optical Elements and Devices
    Light Sources
    Natalia Dushkina
    Lenses, Prisms, and Mirrors
    Peter R. Hall
    Optoelectronic Sensors
    Motohiro Suyama
    Optical Devices and Optomechanical Elements
    Akihiko Chaki and Kenji Magara
    Fundamentals of Principles and Techniques for Metrology
    Propagation of Light
    Natalia Dushkina
    Interferometry
    David A. Page
    Holography
    Giancarlo Pedrini
    Speckle Methods and Applications
    Nandigana Krishna Mohan
    Moire Metrology
    Lianhua Jin
    Optical Heterodyne Measurement Method
    Masao Hirano
    Diffraction
    Toru Yoshizawa
    Light Scattering
    Lev T. Perelman
    Polarization
    Michael Shribak
    Near-Field Optics
    Wenhao Huang, Xi Li, and Guoyong Zhang
    Length and Size
    René Schödel
    Practical Applications
    Displacement
    Akiko Hirai, Mariko Kajima, and Souichi Telada
    Straightness and Alignment
    Ruedi Thalmann
    Flatness
    Toshiyuki Takatsuji and Youichi Bitou
    Surface Profi lometry
    Toru Yoshizawa and Toshitaka Wakayama
    Three-Dimensional Shape Measurement
    Frank Chen, Gordon M. Brown, and Mumin Song
    Fringe Analysis
    Jun-ichi Kato
    Photogrammetry
    Nobuo Kochi
    Optical Methods in Solid Mechanics
    Anand Asundi
    Optical Methods in Flow Measurement
    Sang Joon Lee
    Polarimetry
    Baoliang Wang
    Birefringence Measurement
    Yukitoshi Otani
    Ellipsometry
    Hiroyuki Fujiwara
    Optical Thin Film and Coatings
    Cheng-Chung Lee and Shigetaro Ogura
    Film Surface and Thickness Profi lometry
    Katsuichi Kitagawa
    On-Machine Measurements
    Takashi Nomura and Kazuhide Kamiya

    Biography

    Toru Yoshizawa