Manufacturing Techniques for Microfabrication and Nanotechnology

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ISBN 9781420055191
Cat# 55194



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ISBN 9781439891803
Cat# KE14835



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  • Reviews different forms of lithography, detailing those that differ most from the miniaturization processes used to fashion integrated circuits
  • Explores gas and vapor phase dry etching processes including chemical, physical, and chemical-physical
  • Discusses thermal removing techniques where thermal energy, provided by a heat source, melts and/or vaporizes material from the work piece
  • Covers additive forming processes where materials are added, usually in a selective manner, to a work-piece or a device under construction
  • Includes end-of-chapter problems, worked examples, and 625 color illustrations
  • Contains extensive references for further reading and a comprehensive glossary of terms

Solutions manual, PowerPoint lecture slides, and electronic figures available upon qualifying course adoption.


Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Table of Contents

Photolithography. Next-Generation Lithographies and Lithography Research.

Pattern Transfer with Subtractive Techniques:
Dry Etching. Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools. Thermal Energy-Based Removing. Mechanical Energy-Based Removing.

Pattern Transfer with Additive Techniques:
Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining. Chemical, Photochemical and Electrochemical Forming Techniques. Thermal Energy-Based Forming Techniques—Thermoforming. Micro-Molding Techniques—LIGA.

Downloads / Updates

Resource OS Platform Updated Description Instructions
Cross Platform October 24, 2011 Author's Web site Interactive book errata page:
Dr. Madou’s university homepage:
Dr. Madou’s book blog:
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