1st Edition

Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

Edited By NanoScience & Technology Inst Copyright 2007
    521 Pages
    by CRC Press

    This volume contains papers from the Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1.

    Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

    Chapter 1:
    Bio Nano Systems and Chemistry
    Forisomes: MechanoProteins that Exert Force in Contraction and Expansion
    M. Knoblauch, G.A. Noll, D. Prüfer, H. Jaag, M.E. Fontanellaz, I. SchneiderHüther, A.J.E. van Bel and W.S. Peters
    Fraunhofer Institute IME, DE

    Development of a SelfAssembled MusclePowered Piezoelectric Microgenerator
    J. Xi, E. Dy, MT Hung and C. Montemagno
    UCLA, US

    Nanosecond Pulsed Electric Fields Trigger Intracellular Signals in Human Lymphocytes
    P.T. Vernier, Y. Sun, L. Marcu, C.M. Craft and M.A. Gundersen
    University of Southern California, US

    Viruses as Optical Probes
    ES Kwak, C. Chen, C. Cheng Kao, W.L. Schaich and B. Dragnea
    University of Indiana, US

    pH Dependent Optical Properties of Surface Modified Gold Nanoparticles Using a Bovine Serum Albumin Coating
    Y. Xu, K.A. Linares, K. Meehan, B.J. Love and N.G. Love
    Virginia Polytechnic Institute and State University, US

    Internalization of Nanoparticles in the Middle Ear Epithelium in Response to an External Magnetic Field: Generating a Force
    K. Dormer, C. Seeney, A. Mamedov and F. Mondalek
    University of Oklahoma, Coll. of Med., US

    High Throughput insilico Screening against Flexible Protein Receptors
    H. Merlitz and W. Wenzel
    Forschungszentrum Karlsruhe, DE

    Chapter 2:
    Bio Nano Analysis and Characterization
    Overview of Overlapping Bio and Nano Technologies
    S. Iyer
    LANL, US

    Detection of DNA Hybridyzation with Impedance Amplifying Labels
    KS Ma, H. Zhou, A. Fischetti, J. Zoval and M. Madou
    University of California, Irvine, US

    Functional Nanoarrays for Protein Biomarker Profiling
    M. Lynch, C. Mosher, J. Huff, S. Nettikadan, J. Xu and E. Henderson
    BioForce Nanosciences, Inc., US

    An ChipbasedInstant Protein Micro Array Formation and Detection System
    FG Tseng, C.E. Ho, M.H. Chen, K.Y. Hung, C.J. Su, Y.F. Chen, H.M. Huang and CC Chieng
    National Tsing Hua University, TW

    HighResolution Electrochemical In Situ Printing
    R.D. Egeland and E.M. Southern
    Oxamer & Oxford Gene Technology, UK

    Microfabricated FluorescenceActivated Cell Sorter with Hydrodynamic Flow Manipulation
    H. Bang, C. Chung, J.K. Kim, S. Kim, S. Chung, DC Han and J.K. Chang
    School of Mechanical & Aerospace Eng., Seoul National University, KR

    Development of a SlugFlow PCR Chip with Minimum Heating Cycle Times
    S. Hardt, D. Dadic, F. Doffing, K.S. Drese, G. Münchow and O. Sörensen
    Institute of Microtechnology Mainz, DE

    Composable System Simulation of Dispersion in Complex Electrophoretic Separation Microchips
    Y. Wang, Q. Lin and T. Mukherjee
    Carnegie Mellon University, US

    Visualizing Individual Rhodopsin (a G ProteinCoupled Receptor) Molecules in Native Disk and Reconstituted Membranes via Atomic Force Microscopy
    E.J. Choi, A.J. Jin, SL Niu, P.D. Smith and B.J. Litman
    National Institutes of Health, US

    SampleShunting Based PCR Microfluidic Device
    PA Auroux, P.J.R. Day and A. Manz
    Imperial College, UK

    Highly Efficient Electropermeabilization of Mammalian Cells Using Microelectroporation Chip
    Y.S. Shin, J.K. Kim, S.H. Lim, Y.K. Lee, K. Cho, Y. Lee, S. Chung, C. Chung, DC Han and J.K. Chang
    Seoul National University, KR

    Effect of Substratum Morphology on Cell Behavior
    WT Su, IM Chu, JY Yang and CD Lin
    National Nano Device Laboratories, TW

    An Injector Component Model for Complete Microfluidic Electrokinetic Separation Systems
    R. Magargle, J.F. Hoburg and T. Mukherjee
    Carnegie Mellon University, US

    Dielectrophoresis (DEP) of Cells and Microparticle in PDMS Microfluidic Channels
    T.T. Kanagasabapathi, C.J. Backhouse and K.V.I.S. Kaler
    University of Calgary, CA

    Dry Microarrays: A Generalized Data Source for Genome and Proteome Analysis
    G. Sampath
    The College of New Jersey, US

    Molecular Simulation of DNA Microarrays an Application of 2D particle mesh Ewald algorithm
    T. Watanabe, M. Kawata and U. Nagashima
    National Institute of Advanced Industrial and Science and Technology, Grid Technology Research Cente, JP

    Development and Characterization of a 2D microchipbased Protein separation system.
    J.J. Feng, V Olazábal, J.A. Olivares, S. Sundaram, S. Krishnamoorthy and S. Iyer
    Los Alamos National Laboratory, US

    Amplification of Protein Adsorption on Micro/Nanostructures for Microarray Applications
    E.P. Ivanova, Y.V. Alekseeva, D.K. Pham, L. Filipponi and D.V. Nicolau
    Swinburne University, AU

    Evaluation of Electric Impedance Spectra for Single BioCells with Microfluidic Devices using Combined FEMLAB/HSPICE Simulated Models
    V. Senez, T. Yamamoto, B. Poussard, T. Fukuba, J.M. Capron and T. Fujii
    LIMMS/CNRSIIS University of Tokyo, JP

    Chapter 3:
    Bio Molecular Motors
    Actin Adsorbed on HOPG and Mica Substrates: Characterization and Manipulation by Atomic Force Microscopy
    D.V. Nicolau, G.S. Watson, C. Cahill, J. Blach and S. Myhra
    Swinburne University, AU

    A Molecular Motor that Links the Biological and Silicon Worlds
    T. Robinson, A. Blundell, C.F. Dutta and K. Firman
    University of Portsmouth, UK

    Viral Protein Linear (VPL) NanoActuators
    A. Dubey, G. Sharma, C. Mavroidis, S.M. Tomassone, K.P. Nikitczuk and M.L. Yarmush
    Northeastern University, US

    Biomimetic Molecules as Building Blocks for Synthetic Muscles A Proposal
    A.H. Flood, J. Badjic, JY Han, C. Pentecost, B.H. Northrop, S.J. Cantrill, K.N. Houk and J.F. Stoddart
    UCLA and CNSI, US

    MEMS Biofluidic Device Concept Based on a Supramolecular Motor
    M.J. Knieser, R. Pidaparti, F. Kadioglu, R.D. Harris, M.R. Knieser and A. Hsu
    Indiana Univerisity Purdue University Indianapolis, US

    A Mechanistic Model of the Motility of Actin Filaments on Myosin
    D.V. Nicolau_Jr. and D.V. Nicolau
    Swinburne University, AU

    A Proposal Conceptualization of a Hybrid BioMotoReductor Actuator and the "Virtual Shaft" Hypothesis
    M.A. Venegas
    Nano Science and Technology Institute, MX

    Chapter 4:
    Ion Channels
    The Dielectric Boundary Force in Ion Channels: The Case of Gramicidin
    B. Nadler, U. Hollerbach and R.S. Eisenberg
    Yale University, US

    Brownian Dynamics Simulation of Transport Properties in Potassium Ion Channels
    S. Aboud, D. Marreiro, M. Saraniti and R.S. Eisenberg
    IIT/Rush University, US

    BioMOCA: A Transport Monte Carlo Approach to Ion Channel Simulation
    T.A. van der Straaten, G. Kathawala and U. Ravaioli
    Beckman Institute, University of Illinois, US

    Hybrid MDPNP Simulations of the AlphaHemolysin Open Ion Currents
    I. Cozmuta, J.T. O'Keeffe and V. Stolc
    Eloret Corp, NASA Ames Research Center, US

    Toward an Integrated Computational Environment for Multiscale Computational Design of Nanoscale Ion Channel Semiconductors
    S. Natarajan, S. Varma, Y. Tang, S. Parker, J. Mashl and E. Jakobsson
    NCSA, US

    Chapter 5:
    Bio Nano Computational Methods and Applications
    Numerical Modeling of Diffusion in Extracellular Space of Biological Cell Clusters and Tumors
    J. Berthier, F. Rivera and P. Caillat
    CEALETI, FR

    Mathematical Modeling for Immunocolloid Labeling
    C. Raymond and P. Milewksi
    New Jersey Institute of Technology, US

    Crystallization of Membrane Protein Nanoparticles
    A. Shiryayev, E.F. Holby and J.D. Gunton
    Lehigh University, US

    Monte Carlo Study of Models of Membrane Proteins
    T.P. Connor, D.L. Pagan, A. Shiryayev and J.D. Gunton
    Lehigh University, US

    Biomolecule Electrostatic Optimization with an Implicit Hessian
    J.P. Bardhan, J.H. Lee, M.D. Altman, S. Leyffer, S. Benson, B. Tidor and J.K. White
    Massachusetts Institute of Technology, US

    Self Assembly of Globular Protein Nanoparticles
    A. Shiryayev and J.D. Gunton
    Lehigh University, US

    A Monte Carlo Study of a Model of Globular Protein Nanoparticles
    D.L. Pagan, M.E. Gracheva and J.D. Gunton
    Lehigh University, US

    DNA and Estrogen Receptor Interaction Revealed by the Fragment Molecular Orbital Method Implementation of SCF Convergence
    T. Watanabe, Y. Inadomi, S. Tanaka and U. Nagashima
    National Institute of Advanced Industrial and Science and Technology, JP

    Development of an Advanced Simulation System for the Analysis of Particle Dynamics in LASER based Protein Ion Sources
    A. Hieke
    Ciphergen Biosystems, Inc., US

    Resolved Particle Simulations of Microsphere/Cellbased Bioanalytic Systems
    K. Pant, B.F. Romanowicz and S. Sundaram
    CFD Research Corporation, US

    Chapter 6:
    Bio Micro Sensors and Systems
    Modeling of the Dielectrophoretic Forces Acting upon Biological Cells: A Numerical Comparison between Finite Element/Boundary Element Maxwell Stress Tensor Methods and Dipole Point Approach
    A. Benselama, P. Pham, É. Canot
    CEA, FR

    An Approach for Fabrication of Polymerbased Bioanalytical Microfluidic Devices
    M. Wang, KY Weng, CC Huang, WP Liu and LY Yao
    Industrial Technology Research Institute, TW

    A Generic Sensor for Ultra Low Analyte Concentration Detection
    J. Hedley, C.J. McNeil, J.S. Burdess, A.J. Harris, M.G. Dobson, G. Suarez and H. Berney
    Newcastle University, UK

    Characterization of Micropumps for Biomedical Applications
    Y. Haik, J. Hendrix, M. Kilani, P. Galambus and CJ Chen
    Florida State University, US

    Modeling of Dielectrophoresis for Handling Bioparticles in Microdevices
    G.F. Yao
    Flow Science Inc., US

    QuadruptletsMicroneedle Array for Blood Extraction
    S. Khumpuang, G. Kawaguchi and S. Sugiyama
    Ritsumeikan University, JP

    A Disposable Glucose Biosensor Based on Diffusional Mediator Dispersed in Nanoparticulate Membrane on ScreenPrinted Carbon Electrode
    Z. Gao, F. Xie, M. Shariff, M. Arshad and J.Y. Ying
    Institute of Bioengineering and Nanotechnology, SG

    A Microfluidic System with Nonenzymatic Glucose Sensor
    S. Joo, S. Park, H. Lim, T.D. Chung and HC Kim
    Seoul National University, KR

    Glucometers to Detect for Heart Attack
    Y. Haik, A. Qablan, A. Zwolinski, CJ Chen
    Florida State University, US

    Optical Detection of Integrin AvB3 Using a Nanostructured Lipid Bilayer Membrane Biosensor
    O. Worsfold and T. Nishiya
    Fujirebio Inc., JP

    MicroPatterning of Ionic Reservoirs within a Double Bilayer Lipid Membrane to Fabricate a 2D Array of IonChannel Switch Based Electrochemical Biosensors
    J.M. Sansiñena, C.K. Yee, A. Sapuri, B.I. Swanson, A. Redondo and A.N. Parikh
    Los Alamos National Laboratory, US

    Potentiometric Biosensors Based on Silicon and Porous Silicon
    I. Basu, R.V. Subramanian, A. Mathew, A. Chadha and E. Bhattacharya
    Indian Institute of Technology Madras, IN

    BioImpedance Sensing Device (BISD) for Detection of Human CD4+ Cells
    N.N. Mishra, S. Retterrer, T.J. Zieziulewicz, M. Isaacson, D. Szarowski, D.E. Mousseau, D.A. Lawrence and J.N. Turner
    New York City Department of Health, US

    Behavior of Living Human Neural Networks on Microelectrode Array Support
    R. Pizzi, F. Gelain, A. Fantasia, D. Rossetti and A. Vescovi
    University of Milan, IT

    Glucose Sensors Based on Glucose Oxidase Immobilized in PolypyrrolePolyacrylamide Microparticles
    E. LópezCabarcos, J. RubioRetama, D. Mecerreyes and B. LópezRuiz
    University Complutense, ES

    Chapter 7:
    Micro Fluidics and Nanoscale Transport
    Nanostructure and Phase Transitions in the Liquid Phase of Metallic and Nonmetallic Elements
    G.C. Vezzoli
    Institute for the Basic Sciences, US

    Application of Local Radial Basis Functionbased Differential Quadrature Method in Micro Flows
    D. Xu, H. Ding and C. Shu
    Agency for Science Technology and Research, SG

    Numerical Visualization and Quantification of Chaotic Mixing for Micromixers
    T.G. Kang and T.H. Kwon
    Pohang University of Science and Technology, KR

    A Low Cost Polymer Based PiezoActuated Micropump for Drug Delivery System
    H. Liu, A.A.O. Tay, S.Y.M. Wan and G.C. Lim
    Institute of Materials Research & Engineering, SG

    Galilean Invariant Viscosity Term for an Athermal Integer Lattice Boltzmann Automaton in three Dimensions
    M.C. Geier, A. Greiner and J.G. Korvink
    IMTEK, Albert Ludwigs University Freiburg im Breisgau, DE

    Liquid Disintegration: Investigation of Physics by Simulation
    J. Zeng and T. Korsmeyer
    Coventor, Inc., US

    Capillary Passive Valve in Microfluidic System
    H. Cho, HY Kim, J.Y. Kang and T.S. Kim
    Microsystem Research Center, Korea Institute of Science and Technology, KR

    Clogging Pressures of Bubbles in Microchannel Contractions: Theory and Experiments
    M.J. Jensen, X. Wang, D. Attinger and H. Bruus
    Mikroelektronik Centret, DTU, DK

    InPlane Micropump: Design Optimization
    J. Sin, W.H. Lee and H.E. Stephanou
    RPI, US

    Analysis of Blood Extraction from a Lancet Puncture
    R.J. Kuriger and B.F. Romanowicz
    CFD Research Corporation, US

    Polymeric Micropump with SU8 Check Valves Assembled by Lamination Technique
    T.Q. Truong and N.T. Nguyen
    Nanyang Technological University, SG

    Electrokinetic Instability Mechanism of Doublelayered Miscible Fluids with Different Electrolyte Concentrations in DC Electric Field
    J.W. Park, K.H. Kang and K.Y. Huh
    Pohang University of Science and Technology, KR

    Flow Simulation of a Microfluidic Analog of the FourRoll Mill
    F.R. Phelan_Jr. and S.D. Hudson
    NIST, US

    SOI Processing of a Ring Electrokinetic Chaotic Micromixer
    Y.T. Zhang, H. Chen, I. Mezic, C.D. Meinhart, L. Petzold and N.C. MacDonald
    university of california, santa barbara, US

    Spacific Flow Control Systems Using IR Laser Induced SolGel Transfer of Hydrogel
    J. Tanaka, Y. Shirasaki, M. Tatsuoka, T. Funatsu, S. Watabe, S. Shoji, T. Edura, J. Mizuno and Y. Wada
    Waseda University, JP

    Optimization of Mixing in an Active Micromixing Device
    G. Mathew, I. Mezic, R. Serban and L. Petzold
    University of California, Santa Barbara, US

    Droplet Movement Induced by Nano Assembled Molecules And Micro Textures
    FG Tseng and S.C. Chien
    National Tsing Hua University, ESS Dept., TW

    Analysis of ACDriven Electroosmotic Flow in a Microchannel Packed with Microspheres
    Y.J. Kang, C. Yang and X.Y. Huang
    Nanyang Technological University, SG

    An Effective Passive Micromixer Employing Herringbone Structure
    CF Kung, CF Chen, CC Chu and FG Tseng
    IAM, National Taiwan University, TW

    Novel 2D Interfaces for NanoelectrosprayMass Spectrometry
    S. Arscott, S. Le Gac, C. Druon, P. Tabourier and C. Rolando
    USTL, FR

    DEP Particle Dynamics and the Steady Drag Assumption
    S.T. Wereley, I. Whitacre, R. Bashir and H.B. Li
    Purdue University, US

    Chapter 8:
    MEMS Design and Application
    A New Method to Design Pressure Sensor Diaphragm
    X. Wang, B. Li, S. Lee, Y. Sun, H.T. Roman, K. Chin and K.R. Farmer
    New Jersey Institute of Technology, US

    Lattice Boltzmann Simulations Comparing Conventional and a Heat Conduction Based FlowThrough PCR MicroDevices
    T. Mautner
    SPAWAR Systems Center San Diego, US

    Geometrical Effects in Mechanical Characterizing of Microneedle for Biomedical Applications
    P. Aggarwal and C. Johnston
    University of Calgary, CA

    Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process
    CH Lin, HR Chen, CH Du and W. Fang
    National TsingHua University, TW

    A MEMS Tunable Inductor
    I. ZineElAbidine, M. Okoniewski and J.G. McRory
    University of Calgary and TRLabs, CA

    Design & Simulation of a Mechanical Amplifier for Inertial Sensing Applications
    M.N. Kham, R. Houlihan and M. Kraft
    Southampton University, UK

    Micromachined Thermal Multimorph Actuators Fabricated by Bulketched MUMPs Process
    A. Tuantranont and V.M. Bright
    National Electronics and Computer Technology Center (NECTEC), TH

    Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulketched MUMPs Process
    A. Tuantranont, T. Lomas and V.M. Bright
    National Electronics and Computer Technology Center (NECTEC), TH

    Modelling and Fabrication of Microspring Thermal Actuator
    J.K. Luo, A.J. Flewitt, M. Spearing, N.A. Fleck and W.I. Milne
    University of Cambridge, UK

    The Application of Parametric Excitation to a MicroRing Gyroscope
    B.J. Gallacher, J.S. Burdess, A.J. Harris and J. Hedley
    Insat University of Newcastle, UK

    A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications
    A. Paranjpye, N.C. MacDonald and G.E. Beltz
    University of California, Santa Barbara, US

    Novel Monolithic Micro Droplet Generator
    C.K. Chung, C.J. Lin, C.C. Chen, S.W. Chuang, Y.J. Fang and Y.Z. Hong
    National Cheng Kung University, TW

    A Novel Fabrication Technique of Cylindrical Ion Traps using Low Temperature Cofired Ceramic Tapes
    A. Chaudhary, F.H.W. van Amerom, S. Bhansali and R.T. Short
    University of South Florida, US

    Micromachined IIIV Multimorph Actuator Model and Design using Simulated Annealing (SA)Based Global Optimization
    A. Ongkodjojo, F.E.H. Tay and R. Akkipeddi
    Institute of Materials Research & Engineering, SG

    Optimized Distributive uMixing by Chaotic Multilamination
    F. Schönfeld, K.S. Drese, S. Hardt, V. Hessel and C. Hofmann
    Institut für Mikrotechnik Mainz -(IMM), DE

    Analysis of Micromachined PZT Membranes for MEMS Power
    J.H. Cho, M.J. Anderson, R.F. Richards, D.F. Bahr, and C.D. Richards
    Washington State University, US

    Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores
    Y. Zhuang, M. Vroubel, B. Rejaei and J.N. Burghartz
    Delft University of Technology, NL

    TwoRegime Hollow PDMS Abbe Prism for uTAS Applications
    A. Llobera, R. Wilke and S. Büttgenbach
    Institut für Mikrotechnik, DE

    Device Characterization at the Wafer Level via Optical Actuation and Detection
    J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher
    Newcastle University, UK

    A MOEMS Electrothermal Grating
    E.P. Furlani
    Eastman Kodak Research Labs, US

    Practical Techniques for Measuring MEMS Properties
    J.V. Clark, D. Garmire, M. Last, J. Demmel and S. Govindjee
    Berkeley Sensor and Actuator Center, US

    Pumping Capacity and Reliability Study on SiliconBased Cryogenic Micro Pump
    Y. Zhao, B. Li, D. Ludlow and X. Zhang
    Boston University, US

    Chapter 9:
    Smart MEMS and Sensor Systems
    System Issues in Arrays of Autonomous Intelligent Sensors
    R.M. Newman and E.I. Gaura
    Conventry University, UK

    Simulation of Micromachined Inertial Sensors with HigherOrder Single Loop SigmaDelta Modulators
    Y. Dong and M. Kraft
    University of Southampton, UK

    Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching
    B.G. Morris and G.S May
    Georgia Institute of Technology, US

    GEMS: A Revolutionary System for Environmental Monitoring
    J. Manobianco, R.J. Evans, K.S.J. Pister and D.M. Manobianco
    ENSCO, Inc., US

    Resonant Frequency Shift of Torsional Acutators due to Electrostatic Force
    Z. Xiao, Y. Sun, B. Li, S. Lee, K.S. Sidhu, K.K. Chin and K.R. Farmer
    New Jersey Institute of Technology, US

    Electrostatic Tuning of a MicroRing Gyroscope
    B.J. Gallacher, J. Hedley, J.S. Burdess, A.J. Harris, A. Rickard and D. King
    Insat University of Newcastle, UK

    Macromodel of Intelligent Sensor Structure with Accelometer
    M. Husak, J. Jakovenko, P. Kulha, J. Novak and V. Janicek
    Czech Technical University in Prague, CZ

    Modeling and Practial Verification of the Ionophore Based Chemically Modified Field Effect Transistor
    M. Daniel, M. Szermer, M. Janicki and A. Napieralski
    DMCS, Technical University of Lodz, PL

    Smart, Intelligent and Cogent Microsensors Intelligence for Sensors and Sensors for Intelligence
    E. Gaura and R.M. Newman
    Coventry University, UK

    Chapter 10:
    Micro and Nano Structuring and Assembly
    Soft and Probe Lithography without Ink Transfer
    J. Huskens, X. Li, M. Péter and D.N. Reinhoudt
    University of Twente, MESA+ Research Institute, NL

    Ferrofluid Masking for Lithographic Applications
    B. Yellen and G. Friedman
    Drexel University, US

    Micro Actuator Array based on Ionic Polymer with Patterned SelfAssembled Au Electrode
    M. Le Guilly, C. Xu, M. Taya and Y. Kuga
    University of Washington, US

    Batch Fabrication of Microsensor Arrays by TiO2 Nanoparticle Beam Deposition
    P. Milani, E. Barborini, P. Piseri, S. Iannotta and P. Siciliano
    Universita' di Milano, IT

    Direct Scanning Laser Writing of 3D Multilayer Microstructures
    H. Yu, B. Li and X. Zhang
    Boston University, US

    BottomUp meets TopDown A Novel Approach towards 3D Optical Devices
    R. Houbertz, S. Cochet, G. Domann, M. Popall, J. Serbin, A. Ovsianikov and B.N. Chichkov
    Fraunhofer ISC, DE

    A Novel Method for Determining Optimum Etch Times for the One Step Dry Release Proces
    P.T. Docker, P.K. Kinnell and M.C. Ward
    The University of Birmingham, UK

    Chapter 11:
    Wafer and MEMS Processing
    Planarize the Sidewall Ripples of Silicon Deep Reactive Ion Etching
    KY Weng, MY Wang and PH Tsai
    Industrial Technology Research Institute, TW

    Process Factors in the Reduction of Output Conductance in Submicron CMOS
    N.C. May, H.S. Tan and A.V. Kordesch
    SILTERRA (M) SDN BHD, MY

    Inverse RIE Lag of Silicon Deep Etching
    C.K. Chung and H.N. Chiang
    National Cheng Kung University, TW

    Microscope Slide Electrode Chamber for Nanosecond, MegavoltPerMeter Biological Investigations
    Y. Sun, P.T. Vernier, M. Behrend, L. Marcu and M.A. Gundersen
    University of Southern California, US

    Numerical Analysis of Nanoimprinting Process Based on Continuum Hypothesis
    H.C. Kim, Y.S. Woo, W.I. Lee, S.I. Oh and B.S. Kim
    School of Mechanical and Aerospace Engineering, Seoul National University., KR

    Biography

    NanoScience & Technology Institute