MEMS: Applications

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ISBN 9780849391392
Cat# 9139



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ISBN 9781420036558
Cat# E9139



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  • Provides a survey of the current, emerging, and potential future applications of MEMS technologies
  • Comprises chapters from leading experts from around the world
  • Updates existing chapters where necessary and includes two completely new chapters on microactuators and nonlinear electrokinetic devices
  • Discusses potential technologies such as reactive control for skin-friction reduction and MEMS autonomous control of free-shear flows
  • Includes numerous case studies, examples, figures, and illustrations
  • Summary

    As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

    The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies.

    MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

    Table of Contents

    Introduction; Mohamed Gad-el-Hak
    Inertial Sensors; Paul L. Bergstrom, Melissa L. Trombley, and Gary G. Li
    Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits; Yogesh B. Gianchandani, Chester G. Wilson, and Jae-Sing Park
    Surface Micromachined Devices; Andrew D. Oliver and David W. Plummer
    Microactuators; Alberto Borboni
    Sensors and Actuators for Turbulent Flows; Lennart Löfdahl and Mohamed Gad-el-Hak
    Microrobotics; Thorbjörn Ebefors and Göran Stemme
    Microscale Vacuum Pumps; E. Phillip Muntz, Marcus Young, and Stephen E. Vargo
    Nonlinear Electrokinetic Devices; Yuxing Ben and Hsueh-Chia Chang
    Microdroplet Generators; Fan-Gang Tseng
    Micro Heat Pipes and Micro Heat Spreaders; G.P. "Bud" Peterson and Choondal B. Sobhan
    Microchannel Heat Sinks; Yitshak Zohar
    Flow Control; Mohamed Gad-el-Hak
    Reactive Control for Skin-Friction Reduction; Haecheon Choi
    Toward MEMS Autonomous Control of Free-Shear Flows; Ahmed Naguib