Provides a survey of the current, emerging, and potential future applications of MEMS technologiesComprises chapters from leading experts from around the worldUpdates existing chapters where necessary and includes two completely new chapters on microactuators and nonlinear electrokinetic devicesDiscusses potential technologies such as reactive control for skin-friction reduction and MEMS autonomous control of free-shear flowsIncludes numerous case studies, examples, figures, and illustrations
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies.
MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
Table of Contents
Introduction; Mohamed Gad-el-Hak
Inertial Sensors; Paul L. Bergstrom, Melissa L. Trombley, and Gary G. Li
Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits; Yogesh B. Gianchandani, Chester G. Wilson, and Jae-Sing Park
Surface Micromachined Devices; Andrew D. Oliver and David W. Plummer
Microactuators; Alberto Borboni
Sensors and Actuators for Turbulent Flows; Lennart Löfdahl and Mohamed Gad-el-Hak
Microrobotics; Thorbjörn Ebefors and Göran Stemme
Microscale Vacuum Pumps; E. Phillip Muntz, Marcus Young, and Stephen E. Vargo
Nonlinear Electrokinetic Devices; Yuxing Ben and Hsueh-Chia Chang
Microdroplet Generators; Fan-Gang Tseng
Micro Heat Pipes and Micro Heat Spreaders; G.P. "Bud" Peterson and Choondal B. Sobhan
Microchannel Heat Sinks; Yitshak Zohar
Flow Control; Mohamed Gad-el-Hak
Reactive Control for Skin-Friction Reduction; Haecheon Choi
Toward MEMS Autonomous Control of Free-Shear Flows; Ahmed Naguib