Provides a survey of the materials, fabrication techniques, and technologies used in the design and construction of MEMSIncludes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assemblyComprises chapters from leading experts from around the worldUpdates existing chapters where necessaryIncludes numerous case studies, examples, figures, and illustrations
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The second volume, MEMS: Design and Fabrication, details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.
MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
Table of Contents
Introduction; Mohamed Gad-el-Hak
Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon
MEMS Fabrication; Guangyao Jia and Marc J. Madou
LIGA and Micromolding; Guangyao Jia and Marc J. Madou
X-Ray Based Fabrication; Todd Christenson
EFAB® Technology and Applications; Adam L. Cohen and Chris A. Bang
Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie
Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans
Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies
Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley
Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel
Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei
Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider
Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei