MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications
Features
Summary
The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications.
MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs).
This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.
Table of Contents
Foreword
Preface
Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology
Introduction
What Is MEMS?
Potential Applications of MEMS Devices in Commercial and Space Systems
MEMS Technology for Military Systems Applications
MEMS for Commercial, Industrial, Scientific, and Biomedical System Applications
MEMS Technology for Hard-Disk Drives
MEMS Devices for Uncooled Thermal Imaging Arrays and Cooled Focal Planar Arrays for Various Applications
Applications of Nanotechnology in IR and Electro-Optical Sensors for Biometric and Security Applications
MEMS Technology for Medical Applications
MEMS Technology for Satellite Communications and Space Systems Applications
MEMS Devices for Auto Industry Applications
MEMS Technology for Aerospace System Applications
Potential Actuation Mechanisms, Their Performance Capabilities, and Applications
Introduction
Classification of Actuation Mechanisms
Structural Requirements and Performance Capabilities of Electrostatic Actuation Mechanism
Piezoelectric Actuation Mechanism
Electrothermal Actuation Mechanism
Electromagnetic Actuation Mechanism
Electrodynamic Actuation Mechanism
Electrochemical Actuation Mechanism
Latest and Unique Methods for Actuation
Introduction
Electrostatic Rotary Microactuator with Improved Shaped Design
Unique Microactuator Design for HHD Applications
Capabilities of Vertical Comb Array Microactuator
Capabilities of Bent-Beam Electrothermal Actuators
Packaging, Processing, and Material Requirements for MEMS Devices
Introduction
Packaging and Fabrication Materials
Impact of Environments on MEMS Performance
Material Requirements for Electrostatic Actuator Components
Substrate Materials Best Suited for Various MEMS Devices
RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies
Introduction
Operating Principle and Critical Performance Parameters of MEMS Devices
Performance Capabilities and Design Aspects of RF-MEMS Shunt Switches
MEMS Shunt Switch Configuration for High Isolation
MEMS Switches Using Metallic Membranes
RF-MEMS Switches with Low-Actuation Voltage
RF-MEMS Series Switches
Effects of Packaging Environments on the Functionality and Reliability of the MEMS Switches
Packaging Material Requirements for MEMS Switches
RF/Microwave MEMS Phase Shifter
Introduction
Properties and Parameters of CPW Transmission Lines
Distributed MEMS Transmission-Line Phase Shifters
Design Aspects and DMTL Parameter Requirements for TTD Phase Shifters Operating at mm-Wave Frequencies
Two-Bit MEMS DMTL Phase Shifter Designs
Multi-Bit Digital Phase Shifter Operating at K and Ka Frequencies
Ultrawide Band Four-Bit True Time-Delay MEMS Phase Shifter Operating over dc-40 GHz
Two-Bit, V-Band Reflection-Type MEMS Phase Shifter
Three-Bit, Ultralow Loss Distributed Phase Shifter Operating over K-Band Frequencies
Three-Bit, V-Band, Reflection-Type Distributed MEMS Phase Shifter
Applications of Micropumps and Microfluidic
Introduction
Potential Applications of Micropumps
Design Aspects of Fixed-Valve Micropumps
Dynamic Modeling for Piezoelectric Valve-Free Micropumps
Design Aspects and Performance Capabilities of an Electrohydrodynamic Ion-Drag Micropump
Capabilities of a Ferrofluidic Magnetic Micropump
Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications
Introduction
MEMS Varactors or Tunable Capacitors
Micromechanical Resonators
Micromechanical Filters
Transceivers
Oscillator Using Micromechanical Resonator Technology
V-Band MEMS-Based Tunable Band-Pass Filters
MEMS-Based Strain Sensors
MEMS Interferometric Accelerometers
MEMS-Based Micro-Heat Pipes
MEMS-Based Thin-Film Microbatteries
Materials for MEMS- and Nanotechnology-Based Sensors and Devices
Introduction
Photonic Crystals
Nanotechnology-Based Materials and Applications
Nanoparticles
Quantum Dots
Nanobubbles
MEMS Deformable Micro-Mirrors
Carbon Nanotubes and CNT Arrays
Nanotechnology- and MEMS-Based Sensors and Devices for Specific Applications
Index
A Summary and References appear at the end of each chapter.
Editorial Reviews
“… This comprehensive book on MEMS and nanotechnology (NT) provides a wide-lens perspective of the field. … This stimulating book should appeal to a wide audience consisting of design engineers, research scientists, and program managers. It contains a wealth of synergistic information and insights relating to the innovative field of MEMS and NTs. My friend, A.R. Jha, one of the most prolific writers, has covered a wide range of emerging technical fields, not yet included in the established literature. I am proud to write this foreword in support of his most recent book.”
—From the Foreword, Dr. Ashok K. Sinha, Retired Senior Vice President, Applied Materials, Inc., Santa Clara, California, USA
