Solutions manual, PowerPoint lecture slides, and electronic figure files available upon qualifying course adoption.
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.
The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Volume 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS. Crystallography. Quantum Mechanics and the Band Theory of Solids. Silicon Single Crystal Is Still King. Photonics. Fluidics. Electrochemical and Optical Analytical Techniques. Volume 2: Lithography. Pattern Transfer with Subtractive Techniques. Pattern Transfer with Additive Techniques. Volume 3: From Traditional Manufacturing to Nanotechnology. Scaling Laws, Actuators, and Power and Brains in Miniature Devices.
"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."
—Suman Chakraborty, IIT Kharagpur, India
"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."
—Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland
."… [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"
—Jorg P. Kutter, Technical University of Denmark
|Cross Platform||October 24, 2011||Author's Web site||Interactive book errata page:
Dr. Madou’s university homepage: http://mmadou.eng.uci.edu/
Dr. Madou’s book blog: http://fundamentalsofmicrofabrication.wordpress.com/
Book’s Facebook page: http://www.facebook.com/Micronanomadou