Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set

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ISBN 9780849331800
Cat# 3180



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  • Features recent developments in nano- and micromanufacturing techniques, DNA and protein arrays, fluidics, photonics, and actuators
  • Provides theoretical foundation for understanding the science behind MEMS and NEMS
  • Explores the latest manufacturing techniques, including rapid prototyping and a wide variety of novel nanomanufacturing approaches
  • Offers thorough coverage of Bio-MEMS and Bio-NEMS
  • Contains color illustrations, worked-out example problems, and end-of-chapter problems

Solutions manual, PowerPoint lecture slides, and electronic figure files available upon qualifying course adoption.


Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Table of Contents

Volume I
Historical Note: The Ascent of Silicon, MEMS, and NEMS
Quantum Mechanics and the Band Theory of Solids
Silicon Single Crystal Is Still King
Electrochemical and Optical Analytical Techniques

Volume II
Part I: Lithography
Introduction to Part I
Next-Generation Lithographies and Lithography Research

Part II: Pattern Transfer with Subtractive Techniques
Introduction to Part II
Dry Etching
Wet Chemical Etching and Wet Bulk MicromachiningPools as Tools
Thermal Energy-Based Removing
MechanicalEnergy-Based Removing

Part III: Pattern Transfer with Additive Techniques
Introduction to Part III
Physical and Chemical Vapor DepositionThin Film Properties and Surface Micromachining
Chemical, Photochemical, and Electrochemical Forming Techniques
Thermal Energy-Based Forming TechniquesThermoforming
10 Micromolding TechniquesLIGA

Volume III
Part I: From Traditional Manufacturing to Nanotechnology
Introduction to Part I
Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared
Nature as an Engineering Guide: Biomimetics
Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared
Packaging, Assembly, and Self-Assembly
Selected Materials and Processes for MEMS and NEMS
6 Metrology and MEMS/NEMS Modeling 285

Part II: Scaling Laws, Actuators, and Power and Brains in Miniature Devices
Introduction to Part II
Scaling Laws
Power and Brains in Miniature Devices

Part III: Miniaturization Application
Introduction to Part III
MEMS and NEMS Applications

Editorial Reviews

"… the alpha and omega textbook of micro and nanofabrication and technology. … Madou’s explanations often provide new perspectives to those who are more experienced. … this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."
—CHOICE Magazine

"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."
—Suman Chakraborty, IIT Kharagpur, India

"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."
—Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland

"… [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"
—Jorg P. Kutter, Technical University of Denmark

Downloads / Updates

Resource OS Platform Updated Description Instructions
Cross Platform October 24, 2011 Author's Web site Interactive book errata page:
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