The MEMS Handbook, Second Edition - 3 Volume Set

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ISBN 9780849321061
Cat# 2106



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  • Provides complete coverage of the broad, interdisciplinary, and quickly growing fields of MEMS and nanotechnology
  • Comprises chapters from leading experts from around the world
  • Updates existing chapters where necessary and includes seven completely new chapters
  • Includes numerous case studies, examples, figures, and illustrations
  • Summary

    As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This bestselling handbook is now more convenient than ever, and its coverage is unparalleled.

    MEMS: Introduction and Fundamentals

    The first volume covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.

    MEMS: Design and Fabrication

    This second volume details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.

    MEMS: Applications

    This third volume offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies.

    In addition to seven new chapters, existing chapters were updated and expanded where necessary to reflect the current state of the field. In all, The MEMS Handbook, Second Edition comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling field of MEMS.

    Table of Contents

    Volume 1
    MEMS: Introduction and Fundamentals
    Introduction; Mohamed Gad-el-Hak
    Scaling of Micromechanical Devices; William Trimmer and Robert H. Stroud
    Mechanical Properties of MEMS Materials; William N. Sharpe, Jr.
    Flow Physics; Mohamed Gad-el-Hak
    Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains; Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram
    Molecular-Based Microfluidic Simulation Models; Ali Beskok
    Hydrodynamics of Small-Scale Internal Gaseous Flows; Nicolas G. Hadjiconstantinou
    Burnett Simulations of Flows in Microdevices; Ramesh K. Agarwal and Keon-Young Yun
    Lattice Boltzmann Simulations of Slip Flows in Microchannels; Ramesh K. Agarwal
    Liquid Flow in Microchannels; Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho
    Lubrication in MEMS; Kenneth Breuer
    Physics of Thin Liquid Films; Alexander Oron
    Bubble/Drop Transport in Microchannels; Hsueh-Chia Chang
    Fundamentals of Control Theory; J. William Goodwine
    Model-Based Flow Control for Distributed Architectures; Thomas R. Bewley
    Soft Computing in Control; Mihir Sen and Bill Goodwine
    Volume 2
    MEMS: Design and Fabrication
    Introduction; Mohamed Gad-el-Hak
    Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon
    MEMS Fabrication; Guangyao Jia and Marc J. Madou
    LIGA and Micromolding; Guangyao Jia and Marc J. Madou
    X-Ray Based Fabrication; Todd Christenson
    EFAB® Technology and Applications; Adam L. Cohen and Chris A. Bang
    Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie
    Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans
    Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies
    Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley
    Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel
    Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei
    Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider
    Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei
    Volume 3
    MEMS: Applications
    Introduction; Mohamed Gad-el-Hak
    Inertial Sensors; Paul L. Bergstrom, Melissa L. Trombley, and Gary G. Li
    Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits; Yogesh B. Gianchandani, Chester G. Wilson, and Jae-Sing Park
    Surface Micromachined Devices; Andrew D. Oliver and David W. Plummer
    Microactuators; Alberto Borboni
    Sensors and Actuators for Turbulent Flows; Lennart Löfdahl and Mohamed Gad-el-Hak
    Microrobotics; Thorbjörn Ebefors and Göran Stemme
    Microscale Vacuum Pumps; E. Phillip Muntz, Marcus Young, and Stephen E. Vargo
    Nonlinear Electrokinetic Devices; Yuxing Ben and Hsueh-Chia Chang
    Microdroplet Generators; Fan-Gang Tseng
    Micro Heat Pipes and Micro Heat Spreaders; G.P. “Bud” Peterson and Choondal B. Sobhan
    Microchannel Heat Sinks; Yitshak Zohar
    Flow Control; Mohamed Gad-el-Hak
    Reactive Control for Skin-Friction Reduction; Haecheon Choi
    Toward MEMS Autonomous Control of Free-Shear Flows; Ahmed Naguib Index


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