MEMS and NEMS: Systems, Devices, and Structures

Series:
Nano- and Microscience, Engineering, Technology and Medicine
Published:
January 18, 2002 by CRC Press - 461 Pages
Author(s):
Sergey Edward Lyshevski, Rochester Institute of Technology, New York, USA

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Hardback
$139.95
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ISBN 9780849312625
Cat# 1262