Fundamentals of Microfabrication

Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

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$139.95
ISBN 9780849308260
Cat# 0826
 
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Features

  • Offers the most comprehensive introduction to the science of miniaturization
  • Includes well-chosen examples and hundreds of illustrations, many in full color
  • Provides extensive lists of references, Web links, and suggestions for further reading
  • Reviews both top-down and bottom-up manufacturing methods
  • Bridges the gap between "wet" and "dry" microengineering
  • Details an abundance of industrial and medical MEMS applications, from the historical to the state-of-the-art
  • Summary

    MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

    A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

    Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

    New in the Second Edition

  • Revised chapters that reflect the many recent advances in the field
  • Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
  • In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
  • Many more links to the Web
  • Problem sets in each chapter
  • Table of Contents

    LITHOGRAPHY
    Introduction
    Historical Note: Lithography's Origins
    Photolithography Overview
    Critical Dimension, Overall Resolution, Line-Width
    Lithographic Sensitivity and Intrinsic Resist Sensitivity (Photochemical Quantum Efficiency)
    Resist Profiles
    Contrast and Experimental Determination of Lithographic Sensitivity
    Resolution in Photolithography
    Photolithography Resolution Enhancement Technology
    Beyond Moore's Law
    Next Generation Lithographies
    Emerging Lithography Technologies
    PATTERN TRANSFER WITH DRY ETCHING TECHNIQUES
    Introduction
    Dry Etching: Definitions and Jargon
    Plasmas or Discharges
    Physical Etching: Ion Etching or Sputtering and Ion-Beam Milling
    Plasma Etching (Radical Etching)
    Physical/Chemical Etching
    PATTERN TRANSFER WITH ADDITIVE TECHNIQUES
    Introduction
    Silicon Growth
    Doping of Si
    Oxidation of Silicon
    Physical Vapor Deposition
    Chemical Vapor Deposition
    Silk-Screening or Screen-Printing
    Sol-Gel Deposition Technique
    Doctors' Blade or Tape Casting
    Plasma Spraying
    Deposition and Arraying Methods of Organic Layers in BIOMEMS
    Thin versus Thick Film Deposition
    Selection Criteria for Deposition Method
    WET BULK MICROMACHINING
    Introduction
    Historical Note
    Silicon Crystallography
    Silicon As Substrate
    Silicon As A Mechanical Element In MEMS
    Wet Isotropic And Anisotropic Etching
    Alignment Patterns
    Chemical Etching Models
    Etching With Bias And/Or Illumination Of The Semiconductor
    Etch-Stop Techniques
    Problems With Wet Bulk Micromachining
    SURFACE MICROMACHINING
    Introduction
    Historical Note
    Mechanical Properties of Thin Films
    Surface Micromachining Processes
    Poly-Si Surface Micromachining Modifications
    Non-Poly-Si Surface Micromachining Modifications
    Materials Case Studies
    LIGA AND MICROMOLDING
    Introduction
    LIGA-Background
    LIGA and LIGA-Like Process Steps
    A COMPARISON OF MINIATURIZATION TECHNIQUES: TOP-DOWN AND BOTTOM-UP MANUFACTURING
    Introduction
    Absolute and Relative Tolerance in Manufacturing
    Historical Note: Human Manufacturing
    Section I: Top-Down Manufacturing Methods
    Section II: Bottom-Up Approaches
    MODELING, BRAINS, PACKAGING, SAMPLE PREPARATION AND NEW MEMS MATERIALS
    Introduction
    Modeling
    Brains In Miniaturization
    Packaging
    Substrate Choice
    SCALING, ACTUATORS, AND POWER IN MINIATURIZED SYSTEMS
    Introduction
    Scaling
    Actuators
    Fluidics
    Scaling In Analytical Separation Equipment
    Other Actuators
    Integrated Power
    MINIATURIZATION APPLICATIONS
    Introduction
    Definitions and Classification Method
    Decision Three
    OVERALL MARKET For MICROMACHINES
    Introduction
    Why Use Miniaturization Technology ?
    From Perception to Realization
    Overall MEMS Market Size
    MEMS Market Character
    MEMS Based on Si
    Non-Silicon MEMS
    MEMS versus Traditional Precision Engineering
    The Times are a'Changing
    APPENDICES
    Metrology Techniques
    WWW Linkpage
    Etch Rate for Si, SiO2
    Summary of Top-Down Miniaturization Tools
    Listing of names of 20 amino acids & their chemical formulas; Genetic code
    Summary of Materials and Their Properties for Microfabrication
    References for Detailed Market Information on Miniature Devices
    MEMS Companies Update
    Suggested Further Reading
    Glossary
    Symbols used in Text
    INDEX
    Each chapter also contains sections of examples and problems

    Editorial Reviews

    "The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication."
    -Diane Kauzlarick, EET

     

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