It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.
The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:
These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.
INTRODUCTION
Historical Perspective
The Development of MEMS Technology
MEMS: Present and Future
MEMS Challenges
The Aim of This Book
Questions
References
FABRICATION PROCESSES
Materials
Starting Material - Substrates
Physical Vapor Deposition (PVD)
Chemical Vapor Deposition (CVD)
Etching Processes
Patterning
Wafer Bonding
Annealing
Chemical Mechanical Polishing (CMP)
Material Doping
Summary
Questions
References
MEMS TECHNOLOGIES
Bulk Micromachining
LIGA
Sacrificial Surface Micromachining
Integration of Electronics and MEMS Technology (IMEMS)
Technology Characterization
Alternative MEMS Materials
Summary
Questions
References
SCALING ISSUES FOR MEMS
Scaling of Physical Systems
Computational Issues of Scale
Fabrication Issues of Scale
Material Issues
Newly Relevant Physical Phenomena
Summary
Questions
References
DESIGN REALIZATION TOOLS FOR MEMS
Layout
SUMMiT™ Technology Layout
Design Rules
Standard Components
MEMS Visualization
MEMS Analysis
Summary
Questions
References
ELECTROMECHANICS
Structural Mechanics
Damping
Electrical System Dynamics
Questions
References
MODELING AND DESIGN
Design Synthesis Modeling
Lagrange's Equations
Numerical Modeling
Design Uncertainty
Problems
References
MEMS SENSORS AND ACTUATORS
MEMS Actuators
MEMS Sensing
Questions
References
PACKAGING
Packaging Process Steps
Packaging Case Studies
Summary
Questions
References
RELIABILITY
Reliability Theory and Terminology
Essential Aspects of Probability and Statistics for Reliability
Reliability Models
MEMS Failure Mechanisms
Measurement Techniques for MEMS Operational, Reliability and Failure Analysis Testing
MEMS Reliability and Design
MEMS Reliability Case Studies
Summary
Questions
References
APPENDIX
Glossary
Prefixes
Micro-MKS Conversions
Physical Constants
Material Properties
Stiffness Coefficients of Frequently Used MEMS Flexures
Common MEMS Cross-Section Properties
Design Synthesis Software and Files
Biography
James J. Allen
"This book covers all aspects of MEMS design with large numbers of pictures. It is a very good reference book for everyone interested in the field. It is also an excellent supplementary text for a course on solid state devices."
– In IEEE Circuits & Devices, September/ October 2006, Vol. 22, No. 5
