Micro Electro Mechanical System Design

Micro Electro Mechanical System Design

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Features

  • Alerts the MEMS designer to relevant issues that can save time and money on a project
  • Provides a unified treatment of the course of action to be taken from a product development point of view
  • Guides the reader through the process in a logical, intuitive manner
  • Summary

    It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

    The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:

  • Understanding the fabrication technologies that are available
  • Recognizing the relevant physics involved for micron scale devices
  • Considering implementation issues applicable to computer aided design
  • Focusing on the engineering details and the subsequent evaluation testing
  • Maintaining an eye for detail regarding both reliability and packaging

    These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.
  • Table of Contents

    Table of
    INTRODUCTION
    Historical Perspective
    The Development of MEMS Technology
    MEMS: Present and Future
    MEMS Challenges
    The Aim of This Book
    Questions
    References

    FABRICATION PROCESSES
    Materials
    Starting Material - Substrates
    Physical Vapor Deposition (PVD)
    Chemical Vapor Deposition (CVD)
    Etching Processes
    Patterning
    Wafer Bonding
    Annealing
    Chemical Mechanical Polishing (CMP)
    Material Doping
    Summary
    Questions
    References

    MEMS TECHNOLOGIES
    Bulk Micromachining
    LIGA
    Sacrificial Surface Micromachining
    Integration of Electronics and MEMS Technology (IMEMS)
    Technology Characterization
    Alternative MEMS Materials
    Summary
    Questions
    References

    SCALING ISSUES FOR MEMS
    Scaling of Physical Systems
    Computational Issues of Scale
    Fabrication Issues of Scale
    Material Issues
    Newly Relevant Physical Phenomena
    Summary
    Questions
    References

    DESIGN REALIZATION TOOLS FOR MEMS
    Layout
    SUMMiT™ Technology Layout
    Design Rules
    Standard Components
    MEMS Visualization
    MEMS Analysis
    Summary
    Questions
    References

    ELECTROMECHANICS
    Structural Mechanics
    Damping
    Electrical System Dynamics
    Questions
    References

    MODELING AND DESIGN
    Design Synthesis Modeling
    Lagrange's Equations
    Numerical Modeling
    Design Uncertainty
    Problems
    References

    MEMS SENSORS AND ACTUATORS
    MEMS Actuators
    MEMS Sensing
    Questions
    References

    PACKAGING
    Packaging Process Steps
    Packaging Case Studies
    Summary
    Questions
    References

    RELIABILITY
    Reliability Theory and Terminology
    Essential Aspects of Probability and Statistics for Reliability
    Reliability Models
    MEMS Failure Mechanisms
    Measurement Techniques for MEMS Operational, Reliability and Failure Analysis Testing
    MEMS Reliability and Design
    MEMS Reliability Case Studies
    Summary
    Questions
    References

    APPENDIX
    Glossary
    Prefixes
    Micro-MKS Conversions
    Physical Constants
    Material Properties
    Stiffness Coefficients of Frequently Used MEMS Flexures
    Common MEMS Cross-Section Properties
    Design Synthesis Software and Files

    Editorial Reviews

    "This book covers all aspects of MEMS design with large numbers of pictures. It is a very good reference book for everyone interested in the field. It is also an excellent supplementary text for a course on solid state devices."

    – In IEEE Circuits & Devices, September/ October 2006, Vol. 22, No. 5