Handbook of Surface and Nanometrology
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Summary
The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained with numerous practical examples.
Bringing engineering and physics together at the nanoscale reveals some astonishing effects: geometric features such as shape change meaning; roughness can disappear altogether; signals from instruments have to be dealt with differently depending on scale. These and other aspects are dealt with for the first time in this book. It is relevant not only for today's technology but also for future advances. Many aspects of nanotechnology and precision engineering are considered in chapters on manufacture, characterization, standardization, performance and instrumentation. There is a special chapter on nanometrology and this subject permeates the whole book.
The Handbook of Surface and Nanometrology is the only book that covers these subject areas and is the definitive work in this field. This book is indispensable for firms making, trading, and researching semiconductor devices, MEMS, and micro-optics, as well as tradition precision engineering products. It will also be useful in quality control as well as for research scientists, development engineers, and production managers.
Table of Contents
Preface
Acknowledgments
General Philosophy of Measurement
Where does surface metrology fit in general metrology, and what about nanometrology?
Importance of surface metrology
Surface Characterization: The Nature of Surfaces
Surface roughness characterization
Waviness
Errors of form
Comparison of definitions for surface metrology and coordinate-measuring machines
Characterization of defect shapes on the surface
Summary
References
Processing
Digital methods
Digital properties of random surfaces
Fourier transform and the fast Fourier transform
Statistical parameters in digital form
Properties and implementation of the ambiguity function and Wigner distribution function
Digital estimation of reference lines for surface metrology
Algorithms
Transformations in surface metrology
Surface generation
References
Instrumentation
Introduction and history
Measurement systems
Optical techniques for the measurement of surfaces
Capacitance techniques for measuring surfaces
Inductance technique for measuring surfaces
Impedance technique - skin effect
Other nonstandard techniques
Electron microscopy
Merit of transducers
References
Traceability-Standardization-Variability
Introduction
Nature of errors
Deterministic or systematic error model
Basic components of accuracy evaluation
Basic error theory for a system
Propagation of errors
Some useful statistical tests for surface metrology
Uncertainty in instruments-calibration in general
The calibration of stylus instruments
Calibration of form instruments
Variability of surface parameters
National and international standards
Specification on drawings
Summary
References
Surface Metrology in Manufacture
Introduction
Manufacturing processes
Cutting
Abrasive processes
Unconventional machining
Ways of making structured surfaces
Surface integrity
Surface geometry-a fingerprint of manufacture
Summary
References
Surface Geometry and Its Importance in Function
Introduction
Two-body interaction-the static situation
Functional properties of contact
Two-body interactions-dynamic effects
Surface roughness, mechanical system life and designer surfaces
One-body interactions
One body with radiation (optical). The effect of roughness on the scattering of electromagnetic and other radiation
Scattering by different sorts of waves
System function
Discussion
Conclusions
References
Nanometrology
Introduction
Effect of scale on manufacture, functionality and instrument design
Metrology at the nanoscale
Stability of signal from metrology instruments as function of scale
Calibration
Noise
Calibration artefacts
Dynamics of calibration at nanometre level
Software correction
Nanometre metrology systems
Methods of measuring length and surfaces to nanoscale results with interferometers and other devices
Summary
References
Summary and Conclusions
General
Characterization
Data processing
Instrumentation
Calibration
Manufacture
Surfaces and function
Nanometrology
Overview
Glossary
Index
Editorial Reviews
"The Handbook of Surface and Nanometrology contains a wealth of information for both practical and research engineers. For Taylor Hobson, the volume epitomises the nature of the art of surface metrology and instrument engineering, as could only be recorded through a lifetime of dedication to the subject. This book will give both guidance and food for thought for anyone interested in the subject at whatever level."
- Bruce Wilson, Taylor Hobson
"The book is very useful to the colleagues of my Institute. It will be one of the best books in our library."
- Professor Yuri Chugui
